Magnetic sensing element including pinned layer and/or free layer composed of [110] crystal planes-oriented Heusler alloy
First Claim
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1. A magnetic sensing element comprising:
- a multilayer film comprising;
at least one pinned magnetic layer in which the magnetization direction is pinned in one direction;
a free magnetic layer; and
at least one nonmagnetic layer disposed between the at least one pinned magnetic layer and the free magnetic layer,wherein a current flows in a direction perpendicular to a surface of the layers in the multilayer film, wherein at least one of the free magnetic layer and the pinned magnetic layer comprises a Heusler alloy layer,wherein the Heusler alloy layer has a body-centered cubic (bcc) structure, in which equivalent crystal planes represented as [220] planes are preferentially oriented in a direction parallel to the surface of the layers in the multilayer film, andwherein the Heusler alloy layer is disposed on a bcc layer having a body-centered cubic (bcc) structure, in which equivalent crystal planes represented as [110] planes are preferentially oriented in a direction parallel to a surface of the bcc layer.
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Abstract
A magnetic sensing element using a thin film composed of an adequately crystallized Heusler alloy is provided. At least one of free magnetic layer and pinned magnetic layer includes a Heusler alloy layer. The Heusler alloy layer has a body-centered cubic (bcc) structure, in which equivalent crystal planes represented as [220] planes are preferentially oriented in the direction parallel to the layer surface. The Heusler alloy layer is disposed on a bcc layer having a body-centered cubic (bcc) structure, in which equivalent crystal planes represented as [110] planes are preferentially oriented in the direction parallel to the layer surface.
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15 Claims
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1. A magnetic sensing element comprising:
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a multilayer film comprising; at least one pinned magnetic layer in which the magnetization direction is pinned in one direction; a free magnetic layer; and at least one nonmagnetic layer disposed between the at least one pinned magnetic layer and the free magnetic layer, wherein a current flows in a direction perpendicular to a surface of the layers in the multilayer film, wherein at least one of the free magnetic layer and the pinned magnetic layer comprises a Heusler alloy layer, wherein the Heusler alloy layer has a body-centered cubic (bcc) structure, in which equivalent crystal planes represented as [220] planes are preferentially oriented in a direction parallel to the surface of the layers in the multilayer film, and wherein the Heusler alloy layer is disposed on a bcc layer having a body-centered cubic (bcc) structure, in which equivalent crystal planes represented as [110] planes are preferentially oriented in a direction parallel to a surface of the bcc layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification