Physical quantity sensor having multiple through holes

• US 7,337,670 B2
• Filed: 01/04/2007
• Issued: 03/04/2008
• Est. Priority Date: 04/14/2004
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Murata, Minoru, Asai, Makoto, Yokoyama, Kenichi
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US11/649,254
• Publication Number:
  US 20070120205A1
• Time in Patent Office: 425 Days
• Field of Search: None
• US Class Current: 73/514.16
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.

Claims

1. A semiconductor physical quantity sensor comprising:

a substrate having oxide film;

a semiconductor layer supported on the substrate;

the substrate with the oxide film and semiconductor layer forming a silicon-on-insulator structure;

trenches disposed in the semiconductor layer; and

a movable portion disposed in the semiconductor layer and separated from the oxide film of the substrate by the trenches, the trenches being disposed at an outer periphery of the movable portion,

wherein;

the movable portion faces the oxide film of the substrate,

the movable portion includes through-holes, each of which penetrates the semiconductor layer in a thickness direction,

the movable portion is displaceable on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion, and

one of the through-holes in the movable portion or one of the trenches disposed at the outer periphery of the movable portion has a width permitting a maximum etching rate of an area of the semiconductor layer adjacent thereto.

2. The sensor according to claim 1, wherein:

the one of the through-holes has the width permitting the maximum etching rate.

3. The sensor according to claim 2, wherein:

a second one of the trenches having a second width and a third one of the trenches having a third width are disposed at the outer periphery of the movable portion,

the second width is wider than the third width, and

the one of the through-hole having the width permitting the maximum etching rate in the movable portion is disposed neighboring to the second one of the trenches having the second width.

4. The sensor according to claim 3, wherein:

a third one of the through-holes in the movable portion disposed neighboring to the third one of the trenches having the third width, the third one of the through-holes permitting an etching rate of the semiconductor layer slower than that of the second one of the through-holes in the movable portion disposed neighboring to the second one of the trenches having the second width.

5. The sensor according to claim 1, wherein:

the etching rate of the semiconductor layer and the width of the through-hole or the trench have a relationship where the maximum etching rate is obtained via the width of the through-hole or the trench being around 7 μ

m.

6. The sensor according to claim 5, wherein the etching rate of the semiconductor layer and the width of the through-hole or the trench include a further relationship where the etching rate substantially becomes zero via the width of the through-hole or the trench being equal to or larger than 10 μ

m.

7. A semiconductor physical quantity sensor comprising:

a substrate; and

a semiconductor layer supported by the substrate, the semiconductor layer having a movable portion separated from the substrate by a first trench and a second trench,

wherein;

the movable portion includes through-holes penetrating the semiconductor layer in a thickness direction,

the movable portion moving relative to the substrate when a physical quantity is applied to the movable portion, the physical quantity being detected by a movement of the movable portion, and

one of the through-holes in the movable portion has a width permitting a maximum etching rate of the semiconductor layer.

8. The semiconductor physical quantity sensor according to claim 7, wherein the width is around 7 μ

m.

9. The semiconductor physical quantity sensor according to claim 7, wherein:

the first trench is wider than the second trench, and

the one of the through-holes is adjacent the first trench.

10. A semiconductor physical quantity sensor comprising:

a substrate having an oxide film;

a semiconductor layer supported by the substrate through the oxide film, whereby the semiconductor layer provides a silicon-on-insulator structure;

a first trench provided in the semiconductor layer;

a second trench provided in the semiconductor layer; and

a movable portion partitioned by the first trench and the second trench, and separated from the oxide film of the substrate,

wherein;

the movable portion faces the oxide film of the substrate,

the movable portion has a first through-hole penetrating the semiconductor layer in a thickness direction,

the movable portion is displaceable on the basis of a physical quantity applied to the movable portion, whereby the physical quantity is detected by a displacement of the movable portion, and

the first trench has a first width permitting an etching rate lower than that of the first through-hole, and the second trench has a second width permitting an etching rate lower than that of the first through-hole.

11. The semiconductor physical quantity sensor according to claim 10, wherein:

the movable portion further has a plurality of through-holes in addition to the first through-hole, and

the first through-hole has a width permitting a maximum etching rate among the plurality of the through-holes.

12. The semiconductor physical quantity sensor according to claim 10, wherein:

the first width of the first trench is wider than the second width of the second trench, and

the first through-hole is adjacent the first trench.