Microfluidic device with thin-film electronic devices
First Claim
1. A microfluidic device for analysis of a sample, comprising:
- a substrate portion partially defining a chamber for receiving the sample, the substrate portion includinga substrate having opposing surfaces, anda plurality of thin-film layers formed on the substrate above and adjacent the same opposing surface, the thin-film layers forming a plurality of electronic devices, each of at least two of the electronic devices being formed by a different subset of the plurality of thin-film layers, the at least two electronic devices including
1) a temperature control device for controlling the temperature of fluid in the chamber, and
2) an other electronic device configured to sense or modify a property of fluid in the chamber; and
a fluid barrier connected to the substrate portion to form a wall that seals the chamber against local exit of fluid out of the microfluidic device from the chamber through the wall.
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Accused Products
Abstract
A microfluidic device for analysis of a sample. The microfluidic device includes a substrate portion that at least partially defines a chamber for receiving the sample. The substrate portion includes a substrate having a surface. The substrate portion also includes a plurality of thin-film layers formed on the substrate adjacent the surface. The thin-film layers form a plurality of electronic devices. Each of at least two of the electronic devices is formed by a different set of the thin-film layers. The at least two electronic devices may include 1) a temperature control device for controlling the temperature of fluid in the chamber, and 2) an other electronic device configured to sense or modify a property of fluid in the chamber.
95 Citations
29 Claims
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1. A microfluidic device for analysis of a sample, comprising:
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a substrate portion partially defining a chamber for receiving the sample, the substrate portion including a substrate having opposing surfaces, and a plurality of thin-film layers formed on the substrate above and adjacent the same opposing surface, the thin-film layers forming a plurality of electronic devices, each of at least two of the electronic devices being formed by a different subset of the plurality of thin-film layers, the at least two electronic devices including
1) a temperature control device for controlling the temperature of fluid in the chamber, and
2) an other electronic device configured to sense or modify a property of fluid in the chamber; anda fluid barrier connected to the substrate portion to form a wall that seals the chamber against local exit of fluid out of the microfluidic device from the chamber through the wall. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A microfluidic device for analysis of a sample, comprising:
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a substrate portion partially defining a compartment for holding fluid, the substrate portion including a substrate having opposing surfaces and defining a line that is generally normal to the opposing surfaces, and a plurality of thin-film electronic devices formed on the substrate above and adjacent the same opposing surface, each of the electronic devices being configured to sense or modify a property of fluid in the compartment, at least two of the electronic devices being intersected by the line; and a fluid barrier connected to the substrate portion to form a wall that seals the compartment against local exit of fluid out of the microfluidic device from the compartment through the wall. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A microfluidic device for analysis of a sample, comprising:
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a substrate portion partially defining a compartment for holding fluid, the substrate portion including a substrate having opposing surfaces and defining a line extending generally normal to the opposing surfaces, and a plurality of thin-film layers formed on the substrate above and adjacent the same opposing surface and defining a pair of electronic devices using a different subset of the plurality of thin-film layers for each device of the pair, each electronic device being operable to sense or modify a property of the sample in the compartment, wherein the line intersects the pair of electronic devices; and a fluid barrier connected to the substrate portion to form a wall that seals the compartment against local exit of fluid out of the microfluidic device from the compartment through the wall. - View Dependent Claims (18, 19)
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20. A microfluidic device for analyzing a sample, comprising:
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means for introducing the sample to a compartment partially defined by a substrate portion and sealed by a fluid barrier connected to the substrate portion to form a wall that seals the compartment against local exit of fluid out of the microfluidic device from the compartment through the wall; and means for interacting with the sample in the compartment, such interacting means including at least two electronic devices provided by a plurality of thin-film layers formed on a substrate of the substrate portion, the substrate having opposing surfaces, the thin-film layers being formed above and adjacent the same opposing surface, each of the at least two electronic devices being provided by a different subset of the plurality of thin-film layers. - View Dependent Claims (21, 22, 23, 24)
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25. A microfluidic device for analysis of a sample, comprising:
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a substrate portion partially defining a chamber having a plurality of regions for processing the sample, the substrate portion including a substrate having a pair of opposing surfaces, and a plurality of thin-film layers formed on the substrate above and adjacent the same one of the pair of opposing surfaces, the thin-film layers providing a plurality of temperature control devices for controlling the temperature of fluid in the chamber, the control devices including at least one temperature sensor and at least one heater adjacent each region of the chamber, each temperature control device being configured to be independently regulated to provide a different thermal zone for each region of the chamber. - View Dependent Claims (26, 27, 28, 29)
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Specification