×

Vacuum evaporator

  • US 7,339,182 B2
  • Filed: 01/05/2006
  • Issued: 03/04/2008
  • Est. Priority Date: 01/06/2005
  • Status: Expired due to Fees
First Claim
Patent Images

1. A vacuum evaporator, comprising:

  • a vacuum chamber;

    a source arranged at a bottom of the vacuum chamber, to receive a deposition material therein, the source comprising a heater at an exterior thereof;

    a substrate fixture to fix a substrate over the source, the deposition material from the source for deposition on the substrate;

    a crystal sensor arranged at a side of the substrate; and

    an insert having a hole in front of the crystal sensor.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×