Heterodyne reflectometer for film thickness monitoring and method for implementing

• US 7,339,682 B2
• Filed: 02/25/2005
• Issued: 03/04/2008
• Est. Priority Date: 02/25/2005
• Status: Active Grant

• Current Assignee: Verity Instruments Incorporated
• Original Assignee: Verity Instruments Incorporated
• Inventors: Meloni, Mark A., Aiyer, Arun Ananth, Harvey, Kenneth C., Kueny, Andrew Weeks
• Primary Examiner(s): LEE, HWA S
• Application Number:
  US11/066,933
• Publication Number:
  US 20060192973A1
• Time in Patent Office: 1,103 Days
• Field of Search: 356/484, 356/485, 356/491, 356/492, 356/503, 356/504, 356/505, 356/493, 250/559.27
• US Class Current: 356/504
• CPC Class Codes: G01B 11/0641 with measurement of polarization

Abstract

The present invention is directed to a heterodyne reflectometer system and method for obtaining highly accurate phase shift information from heterodyned optical signals, from which extremely accurate film depths can be calculated. A linearly polarized light comprised of two linearly polarized components that are orthogonal to each other, with split optical frequencies, is directed toward a film causing one of the optical polarization components to lag behind the other due to an increase in the optical path in the film for that component. A pair of detectors receives the beam reflected from the film layer and produces a measurement signal, and the beam prior to incidence on the film layer and generates a reference signal, respectively. The measurement signal and reference signal are analyzed by a phase detector for phase shift. The detected phase shift is then fed into a thickness calculator for film thickness results. A grating interferometer may be included with the heterodyne reflectometer system with a grating, which diffracts the reflected beam into zeroth- and first-order bands, which are then detected by separate detectors. A detector receives the zeroth-order beam and generates another measurement signal. Another detector receives the first-order beam and generates a grating signal. The measurement signal from the grating and reference signal may be analyzed by a phase detector for phase shift, which is related to the thickness of the film. Conversely, either measurement signal may be analyzed with the grating signal by a phase detector for detecting a grating phase shift. The refractive index for the film may be calculated from grating phase shift and the heterodyne phase shift. The updated refractive index is then used for calculating thickness.

Claims

1. A heterodyne reflectometer for measuring thickness of a target layer deposed on a substrate comprising:

an optical light source for producing a split frequency, dual polarized beam;

a beam path diverting optical component for propagating the split frequency, dual polarized beam toward an exposed target layer deposed on a substrate at a predetermined angle of incidence;

a first heterodyne detector for receiving the split frequency, dual polarized beam and generating a reference electrical heterodyne beat signal;

a second heterodyne detector for receiving a reflected split frequency, dual polarized beam from the target layer and generating a measurement electrical heterodyne beat signal;

a phase detector for receiving reference electrical heterodyne beat signal and the measurement electrical heterodyne beat signal, and detecting a phase shift between said reference and measurement electrical heterodyne beat signals; and

a data processor for calculating a thickness relating to the target layer from the phase shift.

2. The heterodyne reflectometer recited in claim 1, wherein the split frequency, dual polarized beam further comprises:

a first elliptical polarized beam component oscillating at a first frequency; and

a second elliptical polarized beam component oscillating at a second frequency, the first frequency being unique from the second frequency.

3. The heterodyne reflectometer recited in claim 1, wherein the split frequency, dual polarized beam further comprises:

a first linear polarized beam component oscillating at a first frequency; and

a second linear polarized beam component oscillating at a second frequency, the first frequency being unique from the second frequency.

4. The heterodyne reflectometer recited in claim 1, wherein the split frequency, linearly polarized beam further comprises:

an s-polarized beam component oscillating at the first frequency; and

a p-polarized beam component, oscillating at the second frequency, wherein the p-polarized beam component is orthogonal to the s-polarized beam component.

5. The heterodyne reflectometer recited in claim 1, wherein the target layer is a film.

6. The heterodyne reflectometer recited in claim 1, wherein the first heterodyne detector further comprises:

a first optical polarizing mixer optically for mixing a first polarization at a first frequency and a second polarization at a second frequency of the split frequency, dual polarized beam and generating a reference optical beat signal;

a first optical detector coupled to the first optical polarizing for receiving the reference optical beat signal and generating the reference electrical heterodyne beat signal, and wherein the second heterodyne detector further comprises;

a second optical polarizing mixer for mixing a reflected first polarization at the first frequency and a reflected second polarization at the second frequency of the reflected split frequency, dual polarized beam and generating a measurement optical beat signal; and

a second optical detector coupled to the second optical polarizing for receiving the measurement optical beat signal and generating the measurement electrical heterodyne beat signal.

7. The heterodyne reflectometer recited in claim 1, further comprising:

phase shift corrector for correcting error in the phase shift, wherein the data processor receives the corrected phase shift and calculates the thickness from the corrected phase shift.

8. The heterodyne reflectometer recited in claim 7, wherein the phase shift corrector produces a corrected phase shift by adjusting the phase shift based on a comparison of a difference between an actual phase shift for known thickness and an expected phase shift for the known thickness.

9. The heterodyne reflectometer recited in claim 1, wherein the predetermined angle of incidence is related to a refractive index for the target layer.

10. The heterodyne reflectometer recited in claim 1, wherein the predetermined angle of incidence is a predetermined default angle.

11. The heterodyne reflectometer recited in claim 1, wherein the predetermined angle of incidence approximates Brewster'"'"'s angle for the target layer.

12. The heterodyne reflectometer recited in claim 1, wherein a lower extent of the predetermined angle of incidence is 0 degrees based on one of a target layer material and an interface below the target layer being isotropic for the split frequency, dual polarized beam.

13. The heterodyne reflectometer recited in claim 1 further comprises:

a grating for diffracting the reflected split frequency, dual polarized beam as a first-order beam;

a third detector for receiving the first-order beam and generating a grating signal; and

a second phase detector for receiving the grating signal and the measurement electrical heterodyne beat signal, and detecting a rating induced phase shift between said grating signal and measurement electrical heterodyne beat signal, wherein the data processor calculates the thickness from the phase shift and the grating induced phase shift.

14. The heterodyne reflectometer recited in claim 8 further comprises:

a grating for diffracting the reflected split frequency, dual polarized beam as a first-order beam;

a third detector for receiving the first-order beam and generating a grating signal;

and a second phase detector for receiving grating signal and the measurement electrical heterodyne beat signal, and detecting a grating induced phase shift between said grating signal and measurement electrical heterodyne beat signal, wherein the data processor calculates thickness from the corrected phase shift and the grating induced phase shift.

15. The heterodyne reflectometer recited in claim 14 further comprises:

a grating phase shift corrector for producing a corrected grating induced phase shift by correcting error in the grating induced phase shift, wherein the data processor calculates the thickness from the corrected grating induced phase shift and the corrected phase shift.

16. The heterodyne reflectometer recited in claim 15, wherein the data processor calculates a refractive index for the target layer from the corrected grating induced phase shift and the corrected phase shift, and calculates the thickness from the refractive index and the corrected phase shift.

17. The heterodyne reflectometer recited in claim 1 further comprising:

a second path diverting optical component for receiving the split frequency, dual polarized beam from the target layer and propagating the split frequency, dual polarized beam toward the film.

18. The heterodyne reflectometer recited in claim 1, wherein the phase detector further comprises:

a mapping function for fitting the reference electrical heterodyne beat signal and the measurement electrical heterodyne beat signal to a predetermined form.

19. The heterodyne reflectometer recited in claim 18, wherein the phase detector further comprises:

a signal conditioner for normalizing the reference electrical heterodyne beat signal and the measurement electrical heterodyne beat signal prior to fitting the electrical heterodyne beat signals to the predetermined form.

20. The heterodyne reflectometer recited in claim 1, wherein the phase detector further comprises:

a time interval counter for measuring a time between two corresponding reference points in the reference and the measurement electrical heterodyne beat signals.

21. The heterodyne reflectometer recited in claim 1, wherein the phase detector further comprises:

a frequency mixer for creating an output voltage proportional to a phase difference between the reference and the measurement electrical heterodyne beat signals.

22. The heterodyne reflectometer recited in claim 21, wherein the phase detector further comprises:

a phase shifter for setting the reference and the measurement electrical heterodyne beat signals to an initial phase.

23. The heterodyne reflectometer recited in claim 22, wherein the phase detector further comprises:

a feed back loop for feeding the output voltage to the phase shifter.

24. The heterodyne reflectometer recited in claim 1, wherein the phase detector further comprises:

an oscillator for producing a frequency signal;

a first frequency mixer for creating a first beat signal from the reference electrical heterodyne beat signal and the frequency signal;

a second frequency mixer for creating a second beat signal from the measurement electrical heterodyne beat signal and the frequency signal; and

a time interval counter for measuring a time between two corresponding reference points in the first and second beat signals.

25. The heterodyne reflectometer recited in claim 1, wherein the phase detector further comprises:

a Discrete Fourier Transform (DFT) for determining the phase shift between the reference and measurement electrical heterodyne beat signals.

26. The heterodyne reflectometer recited in claim 25, wherein the phase detector further comprises:

at least one digitizer for sampling each of the measurement and reference electrical heterodyne beat signals at a predetermined rate based on a heterodyne beat frequency for the measurement and reference signals.

27. The heterodyne reflectometer recited in claim 1, wherein the phase detector further comprises:

a cross correlation function for determining the phase shift between the reference and heterodyne electrical heterodyne beat signals.

28. The heterodyne reflectometer recited in claim 27, wherein the phase detector further comprises:

at least one digitizer for sampling each of the measurement and reference electrical heterodyne beat signals at a predetermined rate based on a heterodyne beat frequency for the measurement and reference electrical heterodyne beat signals and for determining a delay to a number of sample points in a beat cycle for the measurement and reference electrical heterodyne beat signals.

29. A heterodyne reflectometer for measuring a thickness parameter for a target layer deposed on a substrate comprising:

an optical light source for producing a split frequency, dual polarized beam, said split frequency, dual polarized beam having a first polarized beam component oscillating at a first frequency and a second polarized beam component oscillating at a second frequency, the first frequency being unique from the second frequency;

a beam path diverting optical component for propagating the split frequency, dual polarized beam toward an exposed a target layer deposed on a substrate at a predetermined angle of incidence, said target layer having a surface and a body portion;

a first detector for receiving the split frequency, dual polarized beam and generating a reference electrical heterodyne beat signal;

a second detector for receiving a reflected split frequency, dual polarized beam from the target layer and generating a measurement electrical heterodyne beat signal, said reflected split frequency, dual polarized beam being comprised of predominately one of a reflected first polarized beam component and a reflected second polarized beam component from the surface of the target layer and predominately the other of the reflected first polarized beam component and the reflected second polarized beam component from below the surface of the target layer; and

a phase detector for receiving reference electrical heterodyne beat signal and the measurement electrical heterodyne beat signal, and detecting a phase shift between said reference and measurement electrical heterodyne beat signals, said phase shift being induced by a thickness of said target layer body.

30. The heterodyne reflectometer recited in claim 29, further comprises:

a data processor for calculating the thickness of said target layer body thickness from the phase shift.

31. The heterodyne reflectometer recited in claim 29, wherein the first polarization component is a first elliptical polarized beam component and the second polarization component is a second elliptical polarized beam component.

32. The heterodyne reflectometer recited in claim 29, wherein the first polarization component is a first linearly polarized beam component and the second polarization component is a second linearly polarized beam component.

33. The heterodyne reflectometer recited in claim 29, wherein the first polarization component is an s-polarized beam component and the second polarization component is a p-polarized beam component, wherein the p-polarized beam component is orthogonal to the s-polarized beam component.

34. The heterodyne reflectometer recited in claim 29, wherein the target layer is a film.

35. The heterodyne reflectometer recited in claim 29, wherein the predetermined angle of incidence is related to a refractive index for the target layer.

36. The heterodyne reflectometer recited in claim 29, wherein the predetermined angle of incidence is a predetermined default angle.

37. The heterodyne reflectometer recited in claim 36, wherein the predetermined default angle is approximately 60 degrees.

38. The heterodyne reflectometer recited in claim 29, wherein the predetermined angle of incidence approximates Brewster'"'"'s angle for the target layer.

39. The heterodyne reflectometer recited in claim 29, wherein a lower extent of the predetermined angle of incidence is 0 degrees based on one of a target layer material and an interface below the target layer being isotropic for the split frequency, dual polarized beam.

40. The heterodyne reflectometer recited in claim 29, further comprising:

a first optical polarizing mixer optically coupled to the first detector for mixing a first polarization at a first frequency and a second polarization at a second frequency of the split frequency, dual polarized beam; and

a second optical polarizing mixer optically coupled to the second detector for mixing a reflected first polarization at the first frequency and a reflected second polarization at the second frequency of the reflected split frequency, dual polarized beam.

41. The heterodyne reflectometer recited in claim 29, further comprising:

phase shift corrector for correcting error in the phase shift, wherein the data processor receives the corrected phase shift and calculates a thickness from the corrected phase shift.

42. The heterodyne reflectometer recited in claim 41, wherein the phase shift corrector produces a corrected phase shift by adjusting the phase shift based on a comparison of a difference between an actual phase shift for known thickness and an expected phase shift for the known thickness.

43. The heterodyne reflectometer recited in claim 29 further comprises:

a grating for diffracting the reflected split frequency, dual polarized beam as a first-order beam;

a third detector for receiving the first-order beam and generating a grating signal; and

a second phase detector for receiving the grating signal and the measurement signal, and detecting a grating induced phase shift between said grating and measurement signals, wherein the data processor calculates the thickness from the phase shift and the grating induced phase shift.

44. The heterodyne reflectometer recited in claim 42 further comprises:

a grating for diffracting the reflected split frequency, dual polarized beam as a first-order beam;

a third detector for receiving the first-order beam and generating a grating signal;

and a second phase detector for receiving grating signal and the measurement signal, and detecting a grating induced phase shift between said grating and measurement signals, wherein the data processor calculates thickness from the corrected phase shift and the grating induced phase shift.

45. A reflectometry method for measuring a thickness parameter for a target layer deposed on a substrate comprising:

directing an optical light source for producing a split frequency, dual polarized beam toward an exposed a target layer deposed on a substrate at a predetermined angle of incidence, said split frequency, dual polarized beam having a first polarized beam component oscillating at a first frequency and a second polarized beam component oscillating at a second frequency, the first frequency being unique from the second frequency, said target layer comprising a surface and a body;

generating a reference electrical heterodyne beat signal by heterodyning the first polarized beam component oscillating at the first frequency and the second polarized beam component oscillating at the second frequency to produce a reference optical beat signal and converting the reference optical beat signal to the reference electrical heterodyne beat;

receiving a reflected split frequency, dual polarized beam from the target layer; and

generating a measurement electrical heterodyne beat signal by heterodyning a first reflected polarized beam component oscillating at the first frequency and a second reflected polarized beam component oscillating at the second frequency to produce a measurement optical beat signal and converting the measurement optical beat signal to the measurement electrical heterodyne beat; and

detecting a phase shift between said reference electrical heterodyne beat signal and said measurement electrical heterodyne beat signal, said phase shift being induced by a thickness of said target layer body.

46. The reflectometry method recited in claim 45, further comprises:

calculating the thickness of said target layer body thickness from the phase shift.

47. The reflectometry method recited in claim 45, wherein the first polarization component is a first elliptical polarized beam component and the second polarization component is a second elliptical polarized beam component.

48. The reflectometry method recited in claim 45, wherein the first polarization component is a first linearly polarized beam component and the second polarization component is a second linearly polarized beam component.

49. The reflectometry method recited in claim 45, wherein the first polarization component is an s-polarized beam component and the second polarization component is a p-polarized beam component, wherein the p-polarized beam component is orthogonal to the s-polarized beam component.

50. The reflectometry method recited in claim 45, wherein the target layer is a film.

51. The reflectometry method recited in claim 45, wherein the predetermined angle of incidence is related to a refractive index for the target layer.

52. The reflectometry method recited in claim 45, wherein the predetermined angle of incidence is a predetermined default angle.

53. The reflectometry method recited in claim 52, wherein the predetermined default angle is approximately 60 degrees.

54. The reflectometry method recited in claim 45, wherein the predetermined angle of incidence approximates Brewster'"'"'s angle for the target layer.

55. The reflectometry method recited in claim 45, wherein a lower extent of the predetermined angle of incidence is 0 degrees based on one of the target layer body and an interface below the surface of the target layer being isotropic for the split frequency, dual polarized beam.

56. The reflectometry method recited in claim 45, further comprising:

mixing a first polarization at the first frequency and a second polarization at the second frequency of the split frequency, dual polarized beam to produce the reference optical beat signal; and

mixing a reflected first polarization at the first frequency and a reflected second polarization at the second frequency of the reflected split frequency, dual polarized beam to produce the measurement optical beat signal.

57. The reflectometry method recited in claim 45, further comprising:

correcting error in the phase shift; and

calculating an error corrected thickness from the corrected phase shift.

58. The reflectometry method recited in claim 57, wherein correcting error in the phase shift further comprises:

producing a corrected phase shift by adjusting the phase shift based on a comparison of a difference between an actual phase shift for known thickness and an expected phase shift for the known thickness.

59. The reflectometry method recited in claim 45 further comprises:

diffracting the reflected split frequency, dual polarized beam as a first-order beam, said first-order beam comprises a first first-order polarized beam component and a second first-order polarized beam component;

receiving the first-order beam;

generating a grating signal by heterodyning the first first-order polarized beam component and the second first-order polarized beam component;

detecting a grating induced phase shift between said grating and measurement signals; and

calculating a thickness from the phase shift and the grating induced phase shift.

60. The reflectometry method recited in claim 58 further comprises:

diffracting the reflected split frequency, dual polarized beam as a first-order beam, said first-order beam comprises a first first-order polarized beam component and a second first-order polarized beam component;

receiving the first-order beam;

generating a grating signal by heterodyning the first first-order polarized beam component and the second first-order polarized beam component;

detecting a grating induced phase shift between said grating and measurement signals; and

calculating a thickness from the phase shift and the grating induced phase shift.

61. The reflectometry method recited in claim 60 further comprises:

producing a corrected grating induced phase shift by correcting error in the grating induced phase shift based on a comparison between an actual phase shift for known refractive index and an expected phase shift for the known refractive index; and

calculating an error corrected thickness from the corrected grating induced phase shift and the corrected phase shift.

62. The reflectometry method recited in claim 61 further comprises:

calculating a refractive index for the target layer from the corrected grating induced phase shift and the corrected phase shift; and

calculating an error corrected thickness from the refractive index and the corrected phase shift.