Optoelectronic device based on an antiwaveguiding cavity

• US 7,339,965 B2
• Filed: 04/05/2005
• Issued: 03/04/2008
• Est. Priority Date: 04/07/2004
• Status: Active Grant

• Current Assignee: VI Systems GmbH
• Original Assignee: Innolume GmbH
• Inventors: Shchukin, Vitaly, Ledentsov, Nikolai
• Primary Examiner(s): Harvey; Minsun Oh
• Assistant Examiner(s): HAGAN, SEAN P
• Application Number:
  US11/099,360
• Publication Number:
  US 20050226294A1
• Time in Patent Office: 1,064 Days
• Field of Search: None
• US Class Current: 372/45.01
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01L 33/105 with a resonant cavity structure
• CPC Class Codes: H01S 2301/02 ASE (amplified spontaneous emission), noise; Reduction thereof
• CPC Class Codes: H01S 5/183 having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
• CPC Class Codes: H01S 5/2027 Reflecting region or layer, parallel to the active layer, e.g. to modify propagation of the mode in the laser or to influence transverse modes
• CPC Class Codes: H01S 5/205 Antiguided structures
• CPC Class Codes: H01S 5/34 comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers H01S5/36 takes precedence

Abstract

A semiconductor optoelectronic device includes at least one cavity and one multilayered interference reflector. The cavity is designed preferably to possess properties of an antiwaveguiding cavity, where no optical modes propagate in the lateral plane. The existing optical modes are the modes propagating in the vertical direction or in a direction tilted to the vertical direction at an angle smaller than the angle of the total internal reflection at the semiconductor/air interface. This design reduces the influence of parasitic optical modes and improves characteristics of optoelectronic devices including vertical cavity surface emitting lasers, tilted cavity lasers emitting through the top surface or the substrate, vertical or tilted cavity resonant photodetectors, vertical or tilted cavity resonant optical amplifiers, and light-emitting diodes.

Claims

1. A semiconductor optoelectronic device comprising:

a) a cavity;

b) at least one multilayered interference reflector;

c) at least one p-n junction element; and

d) a substrate;

wherein the refractive index of the cavity is lower than a square root of a weighted average of a square of the refractive index of the multilayered interference reflector;

wherein a resonant optical mode, having a first wavelength and propagating at a first tilt angle has a first absolute value of the electric field strength at the p-n junction element and a first value of the leakage losses out of the cavity into the substrate;

wherein optical modes at a different wavelength than the first wavelength or propagating at a different angle than the first angle have a second absolute value of the electric field strength at the p-n junction element smaller than the first absolute value;

wherein the tilt angle is defined as an angle between a direction of propagation of light within the p-n junction element and a direction normal to the lateral plane; and

wherein the second absolute value of the electric field strength at the p-n junction element is smaller than the first absolute value by a factor greater than 3.

2. The semiconductor optoelectronic device of claim 1, wherein the p-n junction element comprises a p-n junction.

3. The semiconductor optoelectronic device of claim 2, further comprising a bias element that applies a bias to the p-n junction.

4. The semiconductor optoelectronic device of claim 3, wherein the device is selected from the group consisting of:

a) a diode laser, where light is generated when a forward bias is applied to the p-n junction;

b) a resonant cavity photodetector, wherein a reverse bias is applied to the p-n junction in which a photocurrent is generated when light is absorbed;

c) a resonant optical amplifier, where light is amplified when a forward bias is applied to the p-n junction; and

d) a lightemitting diode, wherein light is generated when a forward bias is applied to the p-n junction.

5. The semiconductor optoelectronic device of claim 1, wherein output light goes out through a top surface of the device or through the substrate.

6. The semiconductor optoelectronic device of claim 5, wherein the device operates as a vertical cavity optoelectronic device.

7. The semiconductor optoelectronic device of claim 5, wherein the device operates as a tilted cavity optoelectronic device.

8. The semiconductor optoelectronic device of claim 1, wherein input light comes in through a top surface of the device or through the substrate.

9. The semiconductor optoelectronic device of claim 8, wherein the device operates as a vertical cavity optoelectronic device.

10. The semiconductor optoelectronic device of claim 8, wherein the device operates as a tilted cavity optoelectronic device.

11. The semiconductor optoelectronic device of claim 1, wherein the device is a diode laser selected from the group consisting of:

a) a vertical cavity surface emitting laser; and

b) a tilted cavity laser.

12. The semiconductor optoelectronic device of claim 1, wherein the device is a semiconductor resonant cavity photodetector selected from the group consisting of:

a) a vertical cavity resonant photodetector; and

b) a tilted cavity resonant photodetector.

13. The semiconductor optoelectronic device of claim 1, wherein the device is a semiconductor resonant optical amplifier selected from the group consisting of:

a) a vertical cavity resonant optical amplifier; and

b) a tilted cavity resonant optical amplifier.

14. The semiconductor optoelectronic device of claim 1, wherein optical modes at a different wavelength than the first wavelength or propagating at a different angle than the first angle have a second value of the leakage losses into the substrate larger than the first value of the leakage losses.

15. The semiconductor optoelectronic device of claim 14, wherein optical modes other than the resonant optical mode have leakage losses greater than 40 dB/cm.