Method of recipe control operation
First Claim
1. An operation method of a recipe control process in which multiple processing targets are processed in sequence under conditions continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets, whereinthe targets are each placed in numbered places prior to the processing, anddifferent values of at least one control parameter are set for different targets processed in sequence, said method comprising:
- setting a reference value for the at least one control parameter;
allocating the recipes to the numbered places in sequence, said recipes having the reference value for the at least one control parameter;
specifying correction coefficients which lead to the different values of the at least one control parameter, respectively, by correcting the reference value for the at least one control parameter;
applying the correction coefficients to the targets in sequence which are subjected to the processing; and
performing the recipe control process for multiple processing targets by using the correction coefficients applied to the respective processing targets so as to apply in sequence the recipes having the different values of the at least one of the parameters to the respective processing targets.
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Abstract
An operation method of a recipe control process in which multiple processing targets are processed continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets. The method comprises the steps of: (I) specifying correction coefficients to correct at least one of the parameters'"'"' values for each processing target, separately from the recipes, and (II) performing the recipe control process for multiple processing targets and applying the correction coefficients to each processing target to adjust the parameters'"'"' values.
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Citations
20 Claims
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1. An operation method of a recipe control process in which multiple processing targets are processed in sequence under conditions continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets, wherein
the targets are each placed in numbered places prior to the processing, and different values of at least one control parameter are set for different targets processed in sequence, said method comprising: -
setting a reference value for the at least one control parameter; allocating the recipes to the numbered places in sequence, said recipes having the reference value for the at least one control parameter; specifying correction coefficients which lead to the different values of the at least one control parameter, respectively, by correcting the reference value for the at least one control parameter; applying the correction coefficients to the targets in sequence which are subjected to the processing; and performing the recipe control process for multiple processing targets by using the correction coefficients applied to the respective processing targets so as to apply in sequence the recipes having the different values of the at least one of the parameters to the respective processing targets. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An operation method of a processing system in which one processing that includes multiple processing operations is repeated multiple times and in which conditions of each processing operation are controlled by parameters, said method comprising:
specifying recipes, each assigning values of the parameters to each processing operation in each processing run; setting a reference value for the at least one control parameter; allocating the recipes to scheduled runs in sequence, said recipes having the reference value for the at least one control parameter; specifying correction coefficients which lead to the different values of the at least one control parameter, respectively, by correcting the reference value set for the at least one control parameter; and starting processing according to the recipes by applying the correction coefficients to the processing runs in sequence where the recipes are actually performed so as to apply in sequence the recipes having the different values of the at least one of the parameters to the actually performed processing runs. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method of depositing films on semiconductor substrates which are transferred from numbered slots, comprising:
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providing recipes that specify a set of control parameters specifying the processing conditions of processing targets, wherein different values of at least one control parameter are set for different substrates processed in sequence; setting a reference value for the at least one control parameter; allocating the recipes to the numbered slots in sequence, said recipes having the reference value for the at least one control parameter; specifying correction coefficients which lead to the different values of the at least one control parameter, respectively, by correcting the reference value set for the at least one control parameter; applying the correction coefficients to the substrates in sequence which are subjected to the processing; and
depositing films on the substrates from the numbered slots in sequence by using the correction coefficients applied to the respective semiconductor substrates so as to apply in sequence the recipes having the different values of the at least one of the parameters'"'"' values to the respective substrates. - View Dependent Claims (16, 17, 18, 19)
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20. A processing system in which one processing that includes multiple processes is repeated multiple times and in which the conditions of each process are controlled by parameters, said processing system comprising:
a unit that specifies recipes for assigning the parameters'"'"' values to each process in each processing run, wherein a reference value for the at least one control parameter is set, and the recipes are allocated to scheduled runs in sequence, said recipes having the reference value for the at least one control parameter; a unit that specifies correction coefficients which lead to the different values of the at least one control parameter, respectively, by correcting the reference value set for the at least one control parameter; and a unit that starts the processing according to the recipes by applying the correction coefficients to the processing runs in sequence in which the recipes are actually performed so as to apply in sequence the recipes having the different values of the at least one of the parameters to the actually performed processing runs.
Specification