Built-in self test of MEMS

• US 7,340,956 B2
• Filed: 03/08/2006
• Issued: 03/11/2008
• Est. Priority Date: 09/18/2002
• Status: Expired due to Fees

• Current Assignee: Carnegie Mellon University
• Original Assignee: Carnegie Mellon University
• Inventors: Blanton, Ronald D. Shawn, Deb, Nilmoni
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US11/370,818
• Publication Number:
  US 20060150709A1
• Time in Patent Office: 734 Days
• Field of Search: 73 137- 138, 735/040.4, 735/041.2, 735/041.3, 735/041.4, 735/041.5, 735/041.6, 735/143.2, 735/143.6, 735/143.8, 702 92- 96, 702/56, 702/151, 702/153, 702/141, 702/196
• US Class Current: 73/514.32
• CPC Class Codes: B81C 99/005 Test apparatus
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

The present disclosure is directed to an apparatus and method for producing and comparing signals from various points in a MEMS device. By producing signals which should be of substantial identical characteristics, deviations from the situation where the signals are of identical characteristics can be used to identify various types of asymmetry which are otherwise difficult to detect. In one embodiment, the MEMS device is comprised of a plurality of fixed beams arranged symmetrically and a plurality of movable beams arranged symmetrically. A first sensor is formed by certain of the fixed and movable beams while a second sensor, electrically isolated from said first sensor, is formed by at least certain other of the fixed and movable beams. The first and second sensors are located within the MEMS device so as to produce signals of substantially identical characteristics. A circuit is responsive to the first and second sensors for comparing the signals produced by the first and second sensors. In addition to the apparatus, methods of performing a self test are also disclosed, which may be performed in real time.

Claims

1. A method, comprising:

actuating a MEMS device; and

comparing outputs from a first and a second sensor electrically isolated from one another and positioned to produce signals of substantially identical characteristics so as to identify asymmetries in said MEMS device.

2. The method of claim 1 wherein said actuating is performed mechanically.

3. The method of claim 1 wherein said actuating is performed electrically.

4. The method of claim 3 wherein said electrically actuating comprises interchanging a polarity of a modulation signal applied between pairs of fixed and movable members.

5. The method of claim 1 wherein said comparing is performed in real time.

6. The method of claim 1 wherein said comparing reveals local asymmetry.

7. The method of claim 6 wherein said local asymmetry includes one of a particle bridge, vertical misalignment, variation in local etch and unequal parasitics in the interconnects between the sensors and a circuit for analyzing.

8. A method, comprising:

actuating a MEMS device; and

comparing outputs from a first and a second symmetrically located sensor in real time so as to identify asymmetries in said MEMS device.

9. The method of claim 8 wherein said actuating is performed mechanically.

10. The method of claim 8 wherein said actuating is performed electrically.

11. The method of claim 10 wherein said electrically actuating comprises interchanging a polarity of a modulation signal applied between pairs of fixed and movable members.

12. The method of claim 8 wherein said comparing reveals local asymmetry.

13. The method of claim 12 wherein said local asymmetry includes one of a particle bridge, vertical misalignment, variation in local etch and unequal parasitics in the interconnects between the sensors and a circuit for analyzing.