Method of fabricating printhead for ejecting ink supplied under pulsed pressure
First Claim
1. A method of fabricating a printhead for ejecting ink supplied under pulsed pressure, comprising the steps of:
- depositing sacrificial material on a drive circuitry substrate;
etching the sacrificial material to define first deposition zones;
depositing thermally expandable first material on the first deposition zones;
etching the first material and the substrate to define second deposition zones;
depositing conductive material on the second deposition zones so that the conductive material is on the etched first material and substrate;
etching the conductive material to define heating circuitry and connections between the heating and drive circuitry;
depositing thermally expandable second material to embed the heating circuitry in the first and second materials;
etching the second material to define thermally expandable actuator arms and associated closure members;
depositing and etching third material so as to form nozzle chambers having inkjet ports and associated ones of the actuator arms and closure members;
etching the sacrificial material so that each actuator arm has one end connected to the substrate and the other end connected to the associated closure member; and
etching the substrate to form ink supply channels in fluid communication with the nozzle chambers for supply of the ink under pulsed pressure which is ejected from the inkjet ports when the respective closure members are moved under thermal expansion of the respective actuator arms from a position at which the inkjet port is closed to a position at which the ink jetport is open.
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Accused Products
Abstract
A method of fabricating a printhead is provided in which sacrificial material is deposited on a drive circuitry substrate and etched to define first zones, thermally expandable material is deposited on the first zones and etched with the substrate to define second zones, conductive material is deposited on the second zones and etched to define heating circuitry and connections between the heating and drive circuitry, thermally expandable material is deposited to embed the heating circuitry in the thermally expandable materials and etched to define thermally expandable actuator arms and closure members, chamber material is deposited and etched to form nozzle chambers having inkjet ports and associated actuator arms and closure members, the sacrificial material is etched so that each actuator arm has ends connected between the substrate and the associated closure member, and the substrate is etched to form ink supply channels for supply of ink under pulsed pressure.
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Citations
7 Claims
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1. A method of fabricating a printhead for ejecting ink supplied under pulsed pressure, comprising the steps of:
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depositing sacrificial material on a drive circuitry substrate; etching the sacrificial material to define first deposition zones; depositing thermally expandable first material on the first deposition zones; etching the first material and the substrate to define second deposition zones; depositing conductive material on the second deposition zones so that the conductive material is on the etched first material and substrate; etching the conductive material to define heating circuitry and connections between the heating and drive circuitry; depositing thermally expandable second material to embed the heating circuitry in the first and second materials; etching the second material to define thermally expandable actuator arms and associated closure members; depositing and etching third material so as to form nozzle chambers having inkjet ports and associated ones of the actuator arms and closure members; etching the sacrificial material so that each actuator arm has one end connected to the substrate and the other end connected to the associated closure member; and etching the substrate to form ink supply channels in fluid communication with the nozzle chambers for supply of the ink under pulsed pressure which is ejected from the inkjet ports when the respective closure members are moved under thermal expansion of the respective actuator arms from a position at which the inkjet port is closed to a position at which the ink jetport is open. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification