Masking structure having multiple layers including amorphous carbon layer

• US 7,341,957 B2
• Filed: 08/30/2005
• Issued: 03/11/2008
• Est. Priority Date: 09/12/2003
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Sandhu, Gurtej S., Yin, Zhiping, Li, Weimin
• Primary Examiner(s): Zarneke; David A.
• Application Number:
  US11/215,671
• Publication Number:
  US 20060001175A1
• Time in Patent Office: 924 Days
• Field of Search: 438/717, 257/760
• US Class Current: 438/717
• CPC Class Codes: H01L 21/0332 characterised by their composition, e.g. multilayer masks, materials
• CPC Class Codes: H01L 21/3081 characterised by their composition, e.g. multilayer masks, materials
• CPC Class Codes: H01L 21/31144 using masks
• CPC Class Codes: H01L 21/32139 using masks
• CPC Class Codes: H10B 12/033 the capacitor extending over the transistor

Abstract

A masking structure having multiple layers is formed. The masking structure includes an amorphous carbon layer and a cap layer formed over the amorphous carbon layer. The amorphous carbon layer includes transparent amorphous carbon. The cap layer includes non-oxide materials. The masking structure may be used as a mask in an etching process during fabrication of semiconductor devices.

Claims

1. A memory device comprising:

a substrate having a plurality of doped regions;

device structure formed over the substrate, the device structure including a plurality of gate structures, a plurality of contacts, each of the contacts being located between two gate structure and contacting one of the doped regions, and an insulating layer formed over the gate structures and the contacts; and

a masking structure formed over the substrate, the masking structure including an amorphous carbon layer and a cap layer, wherein the cap layer includes non-oxide materials.

2. The memory device of claim 1, wherein the cap layer includes one of boron carbide, boron nitride, silicon carbide, silicon nitride, fluoride films, fluorine doped with oxide, fluorine doped with nitride, and fluorine doped with carbide.

3. The memory device of claim 1, wherein the amorphous carbon layer is transparent in visible light range.

4. The memory device of claim 1, wherein the cap layer includes at least one opening.

5. The memory device of claim 4, wherein the amorphous carbon layer includes at least one opening aligned with the opening of the cap layer.

6. The memory device of claim 5, wherein the masking structure further includes a photoresist layer.

7. The memory device of claim 6, wherein the photoresist layer includes at least one opening continuous with the opening of the cap layer.

8. The memory device of claim 1, wherein the device structure further includes a barrier layer located between the gate structures and the contacts.

9. The memory device of claim 1, wherein the amorphous carbon layer has a thickness of at least 4000 Angstroms.

10. The memory device of claim 1, wherein the device structure has a thickness of at least 40000 Angstroms.

11. A memory device comprising:

a substrate having at least one alignment mark, and a plurality of doped regions;

a plurality of gate structures over the substrate;

an insulating layer over the gate structures;

a plurality of contacts, each of the contacts being located between two gate structures, each of the contacts extending through the insulating layer and contacting one of the doped regions;

an amorphous carbon layer over the substrate, wherein the amorphous carbon layer is transparent in visible light range for improving a reading of the alignment mark; and

a cap layer over the amorphous carbon layer, wherein the cap layer includes non-oxide materials.

12. The memory device of claim 11, wherein the insulating layer include a glass layer.

13. The memory device of claim 12, wherein one of the gate structures and a pair of doped regions of the plurality of doped regions are parts of a transistor.

14. The memory device of claim 13, wherein a first doped region of the pair of doped regions is a part of a capacitor plate.

15. The memory device of claim 14, wherein a second doped region of the pair of doped regions is coupled to a bit line via one of the contacts.

16. The memory device of claim 11 further comprising a photoresist layer over the cap layer.

17. The memory device of claim 16 further comprising an antireflective layer between the photoresist layer and the cap layer.

18. The memory device of claim 11, wherein the cap layer includes boron carbide.

19. The memory device of claim 11, wherein the cap layer includes silicon carbide.

20. The memory device of claim 11, wherein the cap layer includes boron nitride.

21. The memory device of claim 11, wherein the cap layer includes silicon nitride.

22. The memory device of claim 11, wherein the cap layer includes a fluoride film.

23. The memory device of claim 11, wherein the cap layer includes fluoride and nitride.

24. The memory device of claim 11, wherein the cap layer includes fluoride and carbide.

25. A memory device comprising:

a substrate having a plurality of doped regions;

a plurality of gate structures over the substrate;

a glass layer over the gate structures;

a barrier layer between the gate structures and the glass layer for preventing cross-diffusion between the gate structures and the glass layer;

a plurality of contacts, each of the contacts being located between two gate structures and contacting one of the doped regions;

an amorphous carbon layer over the substrate, wherein the amorphous carbon layer is transparent to radiation having wavelengths between 400 nanometers and 700 nanometers; and

a cap layer formed directly over the amorphous carbon layer, wherein the cap layer includes non-oxide materials.

26. The memory device of claim 25, wherein the cap layer includes boron carbide.

27. The memory device of claim 25, wherein the cap layer includes silicon carbide.

28. The memory device of claim 25, wherein the cap layer includes boron nitride.

29. The memory device of claim 25, wherein the cap layer includes silicon nitride.

30. The memory device of claim 25, wherein the cap layer includes a fluoride film.

31. The memory device of claim 25, wherein the cap layer includes fluoride and nitride.

32. The memory device of claim 25, wherein the cap layer includes fluoride and carbide.

33. The memory device of claim 25 further comprising a photoresist layer formed directly over the cap layer.

34. The memory device of claim 33, wherein the photoresist layer includes at least one opening.

35. The memory device of claim 34, wherein the cap layer includes at least one opening continuous with the opening of the photoresist layer.

36. The memory device of claim 35, wherein the amorphous carbon layer includes at least one opening continuous with the opening of the cap layer.

37. The memory device of claim 25, wherein one of the gate structures and a pair of doped regions of the plurality of doped regions are parts of a transistor.

38. The memory device of claim 37, wherein a first doped region of the pair of doped regions is a part of a capacitor plate.

39. The memory device of claim 38, wherein a second doped region of the pair of doped regions is coupled to a bit line via one of the contacts.

40. A method comprising:

forming a plurality of doped regions in a substrate of a memory device, the substrate including at least one alignment mark;

forming a plurality of gate structures over the substrate;

forming an insulating layer over the gate structures;

forming a plurality of contacts, each of the contacts being located between two gate structures, each of the contacts extending through the insulating layer and contacting one of the doped regions;

forming an amorphous carbon layer over the substrate, wherein the amorphous carbon layer is transparent in visible light range for improving a reading of the alignment mark; and

forming a cap layer over the amorphous carbon layer, wherein the cap layer includes non-oxide materials.

41. The method of claim 40, wherein forming the insulating layer includes forming the insulating layer from a glass material.

42. The method of claim 41, wherein one of the gate structures and a pair of doped regions of the plurality of doped regions are parts of a transistor.

43. The method of claim 42, wherein a first doped region of the pair of doped regions is a part of a capacitor plate.

44. The method of claim 43, wherein a second doped region of the pair of doped regions is coupled to a bit line of the memory device via one of the contacts.

45. The method of claim 40, wherein the cap layer is in situ deposited with the amorphous carbon layer.

46. The method of claim 40 further comprising:

forming a photoresist layer over the cap layer.

47. The method of claim 46 further comprising:

forming an antireflective layer between the cap layer and the photoresist layer.

48. The method of claim 46 further comprising:

patterning the photoresist layer to form at least one opening.

49. The method of claim 48 further comprising:

patterning the cap to form at least one opening continuous with the opening of the photoresist layer.

50. The method of claim 49 further comprising:

patterning the amorphous carbon layer to form at least one opening continuous with the opening of the cap layer.

51. A method comprising:

forming a plurality of doped regions in a substrate of a memory device;

forming a plurality of gate structures over the substrate;

forming a glass layer over the gate structures;

forming a barrier layer between the gate structures and the glass layer for preventing cross-diffusion between the gate structures and the glass layer;

forming a plurality of contacts, each of the contacts being located between two gate structures and contacting one of the doped regions;

forming an amorphous carbon layer over the substrate, wherein the amorphous carbon layer is transparent in visible light range; and

forming a cap layer over the amorphous carbon layer, wherein the cap layer includes non-oxide materials.

52. The method of claim 51, wherein one of the gate structures and a pair of doped regions of the plurality of doped regions are parts of a transistor.

53. The method of claim 52, wherein a first doped region of the pair of doped regions is a part of a capacitor plate.

54. The method of claim 53, wherein a second doped region of the pair of doped regions is coupled to a bit line of the memory device via one of the contacts.

55. The method of claim 51 further comprising:

forming a photoresist layer formed directly over the cap layer.

56. The method of claim 55 further comprising:

patterning the photoresist layer to form at least one opening.

57. The method of claim 56 further comprising:

patterning the cap layer to form at least one opening continuous with the opening of the photoresist layer.

58. The method of claim 57 further comprising:

patterning the amorphous carbon layer to form at least one opening continuous with the opening of the cap layer.