Electronic component with semiconductor chips, electronic assembly composed of stacked semiconductor chips, and methods for producing an electronic component and an electronic assembly

• US 7,342,320 B2
• Filed: 04/25/2002
• Issued: 03/11/2008
• Est. Priority Date: 04/25/2001
• Status: Expired due to Fees

• Current Assignee: Polaris Innovations Limited (Wi-LAN Inc.)
• Original Assignee: Infineon Technologies AG
• Inventors: Wennemuth, Ingo, Hedler, Harry
• Primary Examiner(s): IM, JUNGHWA M
• Application Number:
  US10/132,826
• Publication Number:
  US 20020158345A1
• Time in Patent Office: 2,147 Days
• Field of Search: 257/621, 257/620, 257/686, 257/738, 257/778, 257/780, 257/783, 257/786, 257/792, 257/773, 257/774, 257/777, 257/723, 257/737, 257/619, 438/108, 438/109, 438/113, 438/118, 438/124, 438/126, 438/127, 438/612, 438/666, 438/629, 438/637, 438/639, 438/640, 438/667, 438/668, 438/672, 438/675, 438/700, 438/701, 438/713
• US Class Current: 257/786
• CPC Class Codes: H01L 2224/16145 the bodies being stacked
• CPC Class Codes: H01L 23/481 Internal lead connections, e.g. via connections, feedthrough structures
• CPC Class Codes: H01L 25/0652 the devices being arranged next and on each other, i.e. mixed assemblies
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An electronic component includes a semiconductor chip with an active front face and a passive rear face, with contact connections and contact surfaces respectively being provided on the active front face and/or on the passive rear face, and with conductive connections being provided in the form of structured conductive tracks for providing an electrical connection from the active front face to the passive rear face. An electronic assembly formed of stacked semiconductor chips, and a method for producing the electronic component and the electronic assembly are also provided.

Claims

1. An electronic component, comprising:

a semiconductor chip having an active front face, a passive rear face, and at least one side face with a surface;

at least one insulating layer disposed on said active front face, said at least one insulating layer including regions of a silicon dioxide layer and regions of a polyimide layer, said regions of a silicon dioxide layer being in direct contact with said active front face and said regions of a polyimide layer being in direct contact with said regions of a silicon dioxide layer;

an array of structured conductive tracks disposed in direct contact with said regions of a polyimide layer of said at least one insulating layer for providing an electrical connection between said active front face and said passive rear face, said conductive tracks being applied on said surface of said at least one side face;

contact elements including contact surfaces connected to said conductive tracks and contact studs disposed on said conductive tracks on said active front face, said contact surfaces being disposed on said passive rear face;

said active front face including an edge angle of around 63°

to said at least one side face;

said regions of a silicon dioxide layer acting as an etch stop;

said regions of a polyimide layer for protecting said active front face of the semiconductor chip; and

said regions of a silicon dioxide layer and said regions of a polyimide layer including holes therethrough, extending to said active front face, said holes being filled by a contact providing, electrical connection to external contacts in the form of contact studs.

2. The electronic component according to claim 1, wherein:

said semiconductor chip has side faces and has edge regions at respective transitions between said side faces and one of said passive rear face and said active front face; and

said conductive tracks extend along said edge regions.

3. The electronic component according to claim 1, wherein said conductive tracks are composed of at least one material selected from the group consisting of aluminum, copper, silver and gold.

4. The electronic component according to claim 1, wherein said semiconductor chip has etched side faces.

5. The electronic component according to claim 1, wherein:

said passive rear face and said side face define an edge angle of substantially 117°

at a transition between said passive rear face and said side face.

6. The electronic component according to claim 1, wherein said semiconductor chip is a singled semiconductor wafer chip.

7. The electronic component according to claim 1, wherein said semiconductor chip is a chip singled from a semiconductor wafer by anisotropic etching.

8. The electronic component according to claim 1, wherein said structured conductive tracks electrically connect selected ones of said contact studs disposed on said active front face to selected ones of said contact surfaces disposed on said passive rear face.

9. An electronic assembly, comprising:

stacked electronic components including respective semiconductor chips each having an active front face, a passive rear face, a side face, contact elements including contact studs and contact surfaces, said contact studs being disposed on said active front face and said contact surfaces being disposed on said passive rear face, and each of said semiconductor chips having a respective conductive connection plane extending, via said side face, from said active front face to said passive rear face, each said active front face of a respective semiconductor chip including an insulating layer, said insulating layer including a silicon dioxide layer in direct contact with said active front face and a polyimide layer in direct contact with said silicon dioxide layer, said silicon dioxide layer and said polyimide layer including holes therethrough, extending to said active front face, said holes being filled by a contact providing electrical connection to external contacts in the form of contact studs; and

each of said electronic components being connected to another one of said electronic components via said contact studs disposed between a conductive track on said active front face of one of said semiconductor chips and a conductive surface disposed on said passive rear face of an adjacent one of said semiconductor chips; and

said passive rear face of one of said semiconductor chips being followed by said active front face of another of said semiconductor chips.

10. The electronic assembly according to claim 9, wherein said contact connections include solder connections for connecting said contact elements of one of said semiconductor chips to said contact elements of another one of said semiconductor chips.

11. The electronic assembly according to claim 9, wherein said contact connections include at least one of solder connections and adhesive connections for connecting said contact elements of one of said semiconductor chips to said contact elements of another one of said semiconductor chips.

12. The electronic assembly of claim 9, wherein:

said active front face includes regions of a silicon dioxide layer as an etch stop positioned underneath said structured conductive tracks; and

regions of a polyimide layer for protecting the front face of the semiconductor chip are located on said silicon dioxide layer.