Apparatus for reducing power supply noise in an integrated circuit
First Claim
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1. For use in a semiconductor test system, a method for reducing variation in a voltage supplied to a power input terminal of a semiconductor device under test, said method comprising:
- providing power through a probe card to said power input terminal of said semiconductor device under test;
sensing a temporary change in current drawn by said input terminal of said semiconductor device; and
providing supplemental current to said input terminal in response to said temporary change in current, said supplemental current compensating for said temporary change in current.
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Abstract
A power supply provides power to a power terminal of an integrated circuit device under test (DUT). The DUT'"'"'s demand for current at the power input terminal may temporarily increase due, for example, to state changes in the DUT. To limit variation (noise) in voltage at the power input terminal, a supplemental current is supplied to the power input terminal.
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Citations
31 Claims
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1. For use in a semiconductor test system, a method for reducing variation in a voltage supplied to a power input terminal of a semiconductor device under test, said method comprising:
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providing power through a probe card to said power input terminal of said semiconductor device under test; sensing a temporary change in current drawn by said input terminal of said semiconductor device; and providing supplemental current to said input terminal in response to said temporary change in current, said supplemental current compensating for said temporary change in current. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An apparatus for testing a semiconductor device comprising a power input terminal and signal terminals, said apparatus comprising:
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a probe card comprising conductive connection structures for contacting said power input terminal and said signal terminals; a current sensing device disposed to sense a temporary change in current drawn by said power input terminal; and a supplemental current source having an output electrically connected to said connection structure for contacting said power input terminal, an input of said supplemental current source electrically connected to a signal corresponding to said temporary change in current drawn by said power input terminal, said supplemental current compensating for said temporary change in current. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An apparatus for testing a semiconductor device comprising a power input terminal and signal terminals, said apparatus comprising:
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probe means for providing power to said input terminal and signals to at least one of said signal terminals; current sensing means for sensing a temporary change in current drawn by said power input terminal; and supplemental current means for providing supplemental current to said power input terminal in response to said temporary change in current drawn by said power input terminal, said supplemental current compensating for said temporary change in current. - View Dependent Claims (27, 28, 29, 30, 31)
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Specification