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Semiconductor test device using leakage current and compensation system of leakage current

  • US 7,342,408 B2
  • Filed: 08/28/2006
  • Issued: 03/11/2008
  • Est. Priority Date: 08/04/2003
  • Status: Expired due to Fees
First Claim
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1. A compensation system comprising:

  • a semiconductor test device including first and second MOS transistors and a comparator, the first and second MOS transistors being fabricated in the same process as MOS transistors of a semiconductor device, and the comparator being configured to compare first and second leakage currents flowing in the first and second MOS transistors to test whether the MOS transistors of the semiconductor device are fabricated normally; and

    a leakage current compensation device configured to compensate for leakage current flowing in the MOS transistors of the semiconductor device in response to an output signal from the semiconductor test device.

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