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Spatial light modulator with integrated optical compensation structure

  • US 7,342,705 B2
  • Filed: 01/14/2005
  • Issued: 03/11/2008
  • Est. Priority Date: 02/03/2004
  • Status: Expired due to Fees
First Claim
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1. A spatial light modulator comprising:

  • a substrate;

    a plurality of individually addressable light-modulating elements arranged over the substrate and configured to interferometrically modulate light transmitted through the substrate;

    a diffuser; and

    an optical compensation structure, the optical compensation structure different from the diffuser;

    wherein the diffuser and the optical compensation structure are arranged between the substrate and the plurality of individually addressable light-modulating elements.

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