Spatial light modulator with integrated optical compensation structure
First Claim
1. A spatial light modulator comprising:
- a substrate;
a plurality of individually addressable light-modulating elements arranged over the substrate and configured to interferometrically modulate light transmitted through the substrate;
a diffuser; and
an optical compensation structure, the optical compensation structure different from the diffuser;
wherein the diffuser and the optical compensation structure are arranged between the substrate and the plurality of individually addressable light-modulating elements.
3 Assignments
0 Petitions
Accused Products
Abstract
A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
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Citations
36 Claims
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1. A spatial light modulator comprising:
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a substrate; a plurality of individually addressable light-modulating elements arranged over the substrate and configured to interferometrically modulate light transmitted through the substrate; a diffuser; and an optical compensation structure, the optical compensation structure different from the diffuser; wherein the diffuser and the optical compensation structure are arranged between the substrate and the plurality of individually addressable light-modulating elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A spatial light modulator comprising:
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a transparent substrate; a plurality of individually addressable interferometric light-modulating elements arranged over the transparent substrate and configured to modulate light transmitted through the transparent substrate, the interferometric light-modulating elements comprising a cavity and a movable wall; and a plurality of different optical compensation structures arranged between the transparent substrate and the plurality of individually addressable interferometric light-modulating elements, at least one of the optical compensation structures comprising a diffuser.
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18. A spatial light modulator comprising:
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a substrate; a means for interferometrically modulating light transmitted through or reflected from the substrate; a means for diffusing the light transmitted through or reflected from the substrate; and a means for compensating the light transmitted through or reflected from the substrate, the means for compensating the light being different from the means for diffusing the light; wherein the means for diffusing the light and the means for compensating the light are operatively arranged between the substrate and the means for modulating light transmitted through or reflected from the substrate. - View Dependent Claims (19, 20, 21)
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22. A spatial light modulator comprising:
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a substrate; a plurality of individually addressable light-modulating elements arranged over the substrate and configured to interferometrically modulate light transmitted through the substrate; a first optical compensation structure; and a second optical compensation structure, the second optical compensation structure different from the first optical compensation structure, the second optical compensation structure selected from the group consisting of an anti-reflective layer, a plurality of scattering elements, a microlens array, a holographic film that mitigates a shift in reflected color with respect to an angle of incidence of the light transmitted through the substrate, and a diffractive optical element; wherein the first and second optical compensation structures are arranged between the substrate and the plurality of individually addressable light-modulating elements. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification