System and method of testing humidity in a sealed MEMS device

• US 7,343,080 B2
• Filed: 07/01/2005
• Issued: 03/11/2008
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Gally, Brian J., Palmateer, Lauren, Cummings, William J., Kothari, Manish
• Primary Examiner(s): PAK, SUNG H
• Application Number:
  US11/173,822
• Publication Number:
  US 20060067645A1
• Time in Patent Office: 984 Days
• Field of Search: None
• US Class Current: 385/147
• CPC Class Codes: B81C 99/0045 End test of the packaged device
• CPC Class Codes: G01M 3/002 by using thermal means
• CPC Class Codes: G01M 3/02 by using fluid or vacuum
• CPC Class Codes: G01M 3/186 for containers, e.g. radiators
• CPC Class Codes: G01M 3/229 removably mounted in a test cell
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

One embodiment provides a method of testing humidity, comprising: determining a property of a device which encloses a plurality of interferometric modulators; and determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined property. In one embodiment, the property of the device includes one of the following: i) a weight of the device, ii) a color change of a desiccant enclosed in the device, iii) a resistance inside the device, iv) whether frost formed in an inside area of the device which is contacted by a cold finger device, v) whether a desiccant enclosed in the device, when water vapor is provided into the device, is working properly, and vi) combination of at lest two of i)-v).

Claims

1. A method of testing humidity, comprising:

determining a property of a device which encloses a plurality of interferometric modulators; and

determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined property, wherein the property of the device includes one of the following;

i) a weight of the device, ii) color change of a desiccant enclosed in the device and iii) whether a desiccant enclosed in the device, when water vapor is provided into the device, is working properly, and wherein the relative humidity value or the degree of the relative humidity inside the device is determined considering at least one of i) the thickness and width of a seal and ii) adhesive permeability of a component of the device.

2. The method of claim 1, wherein the property of the device includes the combination of at least two of i)-iii).

3. The method of claim 1, further comprising exposing the device to a humid environment before determining the property.

4. The method of claim 3, wherein the humid environment includes a humidity chamber.

5. The method of claim 1, wherein the relative humidity value or the degree of the relative humidity inside the device is determined considering at least one of the following parameters:

i) temperature-humidity combination, i) a desiccant capacity, and v) a device size.

16. The method of claim 1, wherein the desiccant is provided inside the device during a manufacturing process of the device.

6. A system for testing humidity, comprising:

means for determining a property of a device which encloses a plurality of interferometric modulators; and

means for determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined property, wherein the property of the device includes one of the following;

i) a weight of the device, ii) a color change of a desiccant enclosed in the device and iii) whether a desiccant enclosed in the device, when water vapor is provided into the device, is working properly, and wherein the relative humidity value or the degree of the relative humidity inside the device is determined considering at least one of i) the thickness and width of a seal and ii) adhesive permeability.

7. The system of claim 6, wherein the property of the device includes the combination of at least two of i)-iii).

17. The system of claim 6, wherein the desiccant is provided inside the device during a manufacturing process of the device.

8. A method of testing humidity, comprising:

providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant, wherein the desiccant is configured to change its color based on an amount of water vapor absorbed therein;

determining a degree of a color change of the desiccant; and

determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined degree of the color change, wherein the relative humidity value or the degree of the relative humidity inside the device is determined considering at least one of i) the thickness and width of a seal and ii) adhesive permeability.

9. The method of claim 8, wherein the device comprises a backplate which includes at least a transparent portion, wherein determining the degree of the color change is performed via the transparent portion of the backplate.

10. The method of claim 8, wherein the device comprises a transparent backplate, and wherein determining the degree of the color change is performed via the transparent backplate.

11. The method of claim 8, wherein determining the degree of a color change of the desiccant comprises:

exposing the device to a humid environment;

determining a first color of the desiccant before exposing the device to a humid environment;

determining a second color of the desiccant after exposing the device to the humid environment;

comparing the first and second colors; and

determining the degree of a color change of the desiccant based on the color comparison.

12. A method of manufacturing a microelectromechanical systems (MEMS) device, the method comprising:

providing a substrate;

forming a plurality of interferometric modulators on the substrate;

providing a desiccant configured to change its color based on an amount of water vapor absorbed therein;

providing a backplate; and

joining the substrate and the backplate so as to form a device which encloses the plurality of interferometric modulators and the desiccant,

wherein the backplate includes at least one transparent portion through which the color change of the desiccant can be viewed from the outside of the device, and wherein a relative humidity value or a degree of the relative humidity inside the MEMS device is determined considering at least one of i) the thickness and width of a seal and ii) adhesive permeability.

13. The method of claim 12, wherein the relative humidity value or the degree of the relative humidity inside the device is determined considering at least one of the following parameters:

i) temperature-humidity combination, ii) the thickness and width of a seal, iii) adhesive permeability, iv) a desiccant capacity, and v) a device size.

14. A microelectromechanical systems (MEMS) device, comprising:

a substrate;

a plurality of interferometric modulators formed on the substrate;

a desiccant configured to change its color based on an amount of water vapor absorbed therein; and

a backplate;

wherein the substrate and backplate are joined to each other so as to form a device which encloses the plurality of interferometric modulators and the desiccant,

wherein the backplate includes at least one transparent portion through which the color change of the desiccant can be viewed from the outside of the device, and wherein a relative humidity value or a degree of the relative humidity inside the MEMS device is determined considering at least one of i) the thickness and width of a seal and ii) adhesive permeability.

15. The device of claim 14, wherein the backplate is formed of a transparent material.

18. A method of testing humidity, comprising:

determining a property of a device which encloses a plurality of interferometric modulators; and

determining a relative humidity value inside the device based at least in part upon the determined property, wherein the property of the device includes one of the following;

i) a weight of the device, ii) color change of a desiccant enclosed in the device and iii) whether a desiccant enclosed in the device, when water vapor is provided into the device, is working properly.

19. A system for testing humidity, comprising:

means for determining a property of a device which encloses a plurality of interferometric modulators; and

means for determining a relative humidity value inside the device based at least in part upon the determined property, wherein the property of the device includes one of the following;

i) a weight of the device, ii) a color change of a desiccant enclosed in the device and iii) whether a desiccant enclosed in the device, when water vapor is provided into the device, is working properly.