Composite sensor membrane

• US 7,344,678 B2
• Filed: 04/21/2003
• Issued: 03/18/2008
• Est. Priority Date: 11/15/2002
• Status: Expired due to Fees

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Yue, Min, Satyanarayana, Srinath, Majumdar, Arun
• Primary Examiner(s): Warden; Jill
• Assistant Examiner(s): HANDY, DWAYNE K
• Application Number:
  US10/420,661
• Publication Number:
  US 20040096357A1
• Time in Patent Office: 1,793 Days
• Field of Search: 422/68.1, 422/82.01, 422/82.13, 422/98, 204/400, 204/403.1, 204/403.06, 204/403.07, 204/412, 204/415, 435/4, 435/14
• US Class Current: 422/82.01
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: Y10T 428/31681 Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
• CPC Class Codes: Y10T 428/31692 Next to addition polymer from unsaturated monomers
• CPC Class Codes: Y10T 428/31721 Of polyimide
• CPC Class Codes: Y10T 428/31855 Of addition polymer from unsaturated monomers

Abstract

A sensor may include a membrane to deflect in response to a change in surface stress, where a layer on the membrane is to couple one or more probe molecules with the membrane. The membrane may deflect when a target molecule reacts with one or more probe molecules.

Claims

1. A system for amplifying deflection of a sensor, comprising:

a stretchable membrane having opposite fixed ends and a deflectable center portion; and

a layer disposed on the deflectable center portion of the stretchable membrane, wherein the layer has probe molecules thereon such that bonding of target molecules to the probe molecules causes the surface stress of the layer to change thereby bending the layer and deflecting the membrane, and wherein the layer covers only a central portion of the membrane such that deflection of the layer is amplified by the deflection of the membrane, and wherein the stretchable membrane comprises a polymer chosen from the group consisting of polyimide and parylene.

2. A system for amplifying deflection of a sensor, comprising:

a stretchable membrane having a first side, a second side, a third side and a fourth side, and a deflectable center portion, and wherein the membrane is fixed at only the first and the second sides; and

a layer disposed on the deflectable center portion of the stretchable membrane, wherein the layer has probe molecules thereon such that bonding of target molecules to the probe molecules causes the surface stress of the layer to change thereby bending the layer and deflecting the membrane, wherein the layer covers only a central portion of the membrane, such that deflection of the layer is amplified by the deflection of the membrane.

3. The system of claim 2, wherein the stretchable membrane comprises a polymer.

4. The system of claim 2, wherein the layer comprises a material chosen from the group consisting of gold and silicon dioxide.

5. The system of claim 2, wherein the portion of the stretchable membrane covered by the layer is between about 5% and about 90%.

6. The system of claim 5, wherein the portion of the stretchable membrane covered by the layer is between about 10% and about 70%.

7. The system of claim 2, further comprising:

an optical detection system configured to detect deflection of the layer on the stretchable membrane.

8. The system of claim 7, wherein the optical detection system is configured to detect deflection of light reflected off the layer on the stretchable membrane.

9. The system of claim 7, wherein the optical detection system comprises a Fabry-Perot interferometer.

10. The system of claim 7, wherein the optical detection system comprises a Michelson interferometer.

11. The system of claim 2, further comprising:

an electrical detection system configured to detect deflection of the layer on the stretchable membrane.

12. The system of claim 11, wherein the electrical detection system comprises a piezoelectric detector.

13. The system of claim 11, wherein the electrical detection system comprises a piezoresistive detector.

14. The system of claim 2, further comprising:

a substrate, wherein the first side and the second side of the stretchable membrane are attached to the substrate and wherein the deflectable center portion of the stretchable membrane does not touch the substrate.

15. The system of claim 14, wherein the stretchable membrane covers a well in the substrate.

16. The system of claim 15, further comprising:

a fluid channel in the substrate to provide fluid to the well.

17. The system of claim 15, further comprising:

a cover to enclose the well.

18. The system of claim 17, further comprising:

a fluid channel in the cover to provide fluid to the well.

19. The system of claim 2, wherein the stretchable membrane is rectangular.

20. A system, comprising:

(a) a substrate having a first well and a second well disposed therein;

(b) a first sensor, comprising;

(i) a stretchable membrane having opposite fixed ends and a deflectable center portion, wherein the first stretchable membrane covers the first well in the substrate; and

(ii) a layer disposed on the deflectable center portion of the stretchable membrane, wherein the layer has probe molecules thereon such that bonding of target molecules to the probe molecules causes the surface stress of the layer to change thereby bending the layer and deflecting the membrane, wherein the layer covers only a central portion of the membrane such that deflection of the layer is amplified by the deflection of the membrane, and wherein the first stretchable membrane covers the first well and the second stretchable membrane covers the second well;

(c) a second sensor, comprising;

(i) a stretchable membrane having opposite fixed ends and a deflectable center portion, wherein the second stretchable membrane covers the second well in the substrate; and

(ii) a layer disposed on the deflectable center portion of the stretchable membrane, wherein the layer covers only a central portion of the membrane such that deflection of the layer is amplified by the deflection of the membrane;

(d) a first channel to provide fluid to the first well;

(e) a second channel to provide fluid to the second well; and

(f) a cover to enclose the first and second wells.

21. The system of claim 20, wherein the first and second channels are formed in the substrate.

22. The system of claim 20, wherein the first and second channels are formed in the cover.

23. The system of claim 20, wherein the cover is to transmit light to sense deflection of the membrane.

24. The system of claim 20, wherein the first and second membranes comprise a polymer.

25. The system of claim 24, wherein the polymer is chosen from the group consisting of parylene and polyimide.

26. The system of claim 20, wherein the layers on the membranes comprise a material chosen from the group consisting of gold and silicon dioxide.

27. The system of claim 20, further comprising one or more of the probe molecules coupled with the first membrane.

28. The system of claim 20, wherein the portion of the stretchable membrane covered by the layer in each of the first and second sensors are between about 5% and about 90%.

29. The system of claim 28, wherein the portion of the stretchable membrane covered by the layer in each of the first and second sensors are is between about 10% and about 70%.

30. The system of claim 20, wherein the layer disposed on the deflectable center portion of the stretchable membrane of the second sensor further comprises:

probe molecules thereon such that bonding of target molecules to the probe molecules causes the surface stress of the layer to change.

31. The system of claim 30, wherein the probe molecules on the layer in the first sensor are different from the probe molecules on the layer in the second sensor.

32. A system for amplifying deflection of a sensor, comprising:

a stretchable rectangular membrane having opposite fixed ends and a deflectable center portion;

a substrate, wherein the opposite ends of the stretchable membrane are attached to the substrate and wherein the deflectable center portion of the stretchable membrane does not touch the substrate; and

a layer disposed on the deflectable center portion of the stretchable membrane, wherein the layer has probe molecules thereon such that bonding of target molecules to the probe molecules causes the surface stress of the layer to change thereby bending the layer and deflecting the membrane, wherein the layer covers only a central portion of the membrane, such that deflection of the layer is amplified by the deflection of the membrane.

33. The system of claim 32, wherein the stretchable membrane covers a well in the substrate.

34. The system of claim 33, further comprising a fluid channel in the substrate to provide fluid to the well.

35. The system of claim 33, further comprising a cover to enclose the well.

36. The system of claim 35, further comprising a fluid channel in the cover to provide fluid to the well.

37. The system of claim 32, wherein the portion of the stretchable membrane covered by the layer is between about 5% and about 90%.

38. The system of claim 37, wherein the portion of the stretchable membrane covered by the layer is between about 10% and about 70%.

39. A system for amplifying deflection of a sensor, comprising:

a stretchable membrane having a plurality of sides and a deflectable center portion, the membrane having fixed opposite ends and wherein the membrane is fixed at only two sides of the plurality of sides; and

a layer disposed on the deflectable center portion of the stretchable membrane, wherein the layer has probe molecules thereon such that bonding of target molecules to the probe molecules causes the surface stress of the layer to change thereby bending the layer and deflecting the membrane, wherein the layer covers only a central portion of the membrane, such that deflection of the layer is amplified by the deflection of the membrane.

40. The system of claim 39 further comprising a substrate, wherein the opposite ends of the stretchable membrane are attached to the substrate and wherein the deflectable center portion of the stretchable membrane does not touch the substrate.

41. The system of claim 40, wherein the stretchable membrane covers a well in the substrate.

42. The system of claim 40, further comprising a fluid channel in the substrate to provide fluid to the well.

43. The system of claim 40, further comprising a cover to enclose the well.

44. The system of claim 40, further comprising a fluid channel in the cover to provide fluid to the well.