Wafer-level burn-in and test
First Claim
1. Method of performing burn-in on semiconductor devices, comprising:
- electrically connecting first terminals of a test substrate to second terminals of at least one semiconductor device (DUT) by compressing a plurality of electrically conductive spring contact elements between the first terminals and the second terminals, wherein each of the conductive spring contact elements directly connects one of the first terminals to one of the second terminals;
powering up the at least one DUT;
maintaining the at least one DUT at a first temperature; and
maintaining the test substrate at a second temperature which is independent of the first temperature.
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Accused Products
Abstract
Techniques for performing wafer-level burn-in and test of semiconductor devices include a test substrate having active electronic components such as ASICs mounted to an interconnection substrate or incorporated therein, metallic spring contact elements effecting interconnections between the ASICs and a plurality of devices-under-test (DUTs) on a wafer-under-test (WUT), all disposed in a vacuum vessel so that the ASICs can be operated at temperatures independent from and significantly lower than the burn-in temperature of the DUTs. The spring contact elements may be mounted to either the DUTs or to the ASICs, and may fan out to relax tolerance constraints on aligning and interconnecting the ASICs and the DUTs. Physical alignment techniques are also described.
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Citations
8 Claims
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1. Method of performing burn-in on semiconductor devices, comprising:
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electrically connecting first terminals of a test substrate to second terminals of at least one semiconductor device (DUT) by compressing a plurality of electrically conductive spring contact elements between the first terminals and the second terminals, wherein each of the conductive spring contact elements directly connects one of the first terminals to one of the second terminals; powering up the at least one DUT; maintaining the at least one DUT at a first temperature; and maintaining the test substrate at a second temperature which is independent of the first temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification