×

Continuously tunable RF MEMS capacitor with ultra-wide tuning range

  • US 7,345,866 B1
  • Filed: 05/13/2005
  • Issued: 03/18/2008
  • Est. Priority Date: 05/13/2005
  • Status: Expired due to Fees
First Claim
Patent Images

1. A MEMS varactor comprising:

  • a base portion including a first actuation electrode;

    a cantilever assembly mounted on the base portion, the cantilever assembly including a second actuation electrode;

    a first capacitance plate attached to the cantilever assembly;

    a second capacitance plate attached to the base portion; and

    a dielectric element disposed between the first capacitance plate and the second capacitance plate;

    wherein the cantilever assembly is deformable towards the base portion in response to a voltage difference between the first actuation electrode and the second actuation electrode resulting in a change in the distance between the first capacitance plate and the second capacitance plate.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×