Continuously tunable RF MEMS capacitor with ultra-wide tuning range
First Claim
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1. A MEMS varactor comprising:
- a base portion including a first actuation electrode;
a cantilever assembly mounted on the base portion, the cantilever assembly including a second actuation electrode;
a first capacitance plate attached to the cantilever assembly;
a second capacitance plate attached to the base portion; and
a dielectric element disposed between the first capacitance plate and the second capacitance plate;
wherein the cantilever assembly is deformable towards the base portion in response to a voltage difference between the first actuation electrode and the second actuation electrode resulting in a change in the distance between the first capacitance plate and the second capacitance plate.
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Abstract
A method is provided of continuously varying the capacitance of a MEMS varactor having a cantilever assembly mounted on a base portion, the cantilever assembly having a first capacitance plate and a dielectric element mounted thereon, and the base portion having a second capacitance plate mounted thereon. The method includes applying a first actuation voltage to deform the cantilever assembly until the dielectric element contacts the second capacitance plate leaving a gap therebetween, and applying a second actuation voltage larger than the first actuation voltage to further deform the cantilever assembly to reduce the gap between the dielectric element and the second capacitance plate.
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Citations
19 Claims
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1. A MEMS varactor comprising:
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a base portion including a first actuation electrode; a cantilever assembly mounted on the base portion, the cantilever assembly including a second actuation electrode; a first capacitance plate attached to the cantilever assembly; a second capacitance plate attached to the base portion; and a dielectric element disposed between the first capacitance plate and the second capacitance plate; wherein the cantilever assembly is deformable towards the base portion in response to a voltage difference between the first actuation electrode and the second actuation electrode resulting in a change in the distance between the first capacitance plate and the second capacitance plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of continuously varying the capacitance of a MEMS varactor, the method comprising:
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providing a MEMS varactor having a cantilever assembly mounted on a base portion, the cantilever assembly having a first capacitance plate and a dielectric element mounted thereon, and the base portion having a second capacitance plate mounted thereon; applying a first actuation voltage to deform the cantilever assembly until the dielectric element contacts the second capacitance plate leaving a gap therebetween; and applying a second actuation voltage larger than the first actuation voltage to further deform the cantilever assembly to reduce the gap between the dielectric element and the second capacitance plate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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Specification