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Coupling apparatus for inertial sensors

  • US 7,347,094 B2
  • Filed: 04/14/2005
  • Issued: 03/25/2008
  • Est. Priority Date: 04/14/2004
  • Status: Active Grant
First Claim
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1. Apparatus for coupling sensor elements of an inertial sensor, the apparatus comprising:

  • a bar coupled between first and second sensor element frames; and

    a plurality of anchor flexures supporting the bar above a substrate underlying the frames, each anchor flexure including a structure anchored at one end to the substrate and folded back 180 degrees to meet with the bar, the anchor flexures allowing the bar to rotate at a pivot point when the frames move in anti-phase to one another along separate substantially parallel axes but substantially preventing in-phase movements of the frames, wherein the anchor flexures are anchored adjacent to the bar about the pivot point.

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