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Integral resonator gyroscope

  • US 7,347,095 B2
  • Filed: 08/08/2005
  • Issued: 03/25/2008
  • Est. Priority Date: 08/12/2002
  • Status: Expired due to Term
First Claim
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1. A sensor, comprising:

  • a planar mechanical resonator for sensing motion of the sensor; and

    a case for housing the resonator;

    wherein the resonator and a wall of the case are defined through an etching process and the planar resonator is supported at a central mounting point of the planar mechanical resonator and the sensor further comprises a rigid support for the planar resonator providing a rigid attachment carrying substantially no vibratory loads between the case and the resonator at the central mounting point of the resonator.

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