Scanning particle beam instrument

• US 7,348,557 B2
• Filed: 08/22/2005
• Issued: 03/25/2008
• Est. Priority Date: 09/03/2004
• Status: Expired due to Fees

• Current Assignee: Carl Zeiss Microscopy Ltd. (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Microscopy Ltd. (Carl-Zeiss-Stiftung)
• Inventors: Armit, Andrew Philip
• Primary Examiner(s): Berman; Jack I.
• Assistant Examiner(s): SMYTH, ANDREW P
• Application Number:
  US11/208,492
• Publication Number:
  US 20060060783A1
• Time in Patent Office: 946 Days
• Field of Search: 250/310
• US Class Current: 250/310
• CPC Class Codes: H01J 2237/043 Beam blanking
• CPC Class Codes: H01J 2237/1501 Beam alignment means or procedures
• CPC Class Codes: H01J 2237/2487 using digital signal processors
• CPC Class Codes: H01J 2237/2826 Calibration
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

A scanning particle beam instrument is provided, the instrument including a scanner, a radiation detector and a DC amplifier, the DC amplifier being operable to amplify a signal generated by the radiation detector to produce a video signal, the instrument further including a controller operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

Claims

1. A scanning particle beam instrument that includes a scanner, a radiation detector and a DC amplifier, the scanner being operable to scan a beam of charged particles relative to a specimen, the radiation detector being operable to generate a signal representative of an intensity of radiation resulting from interaction of the beam and a specimen, and the DC amplifier being operable to amplify the signal generated by the radiation detector to produce a video signal, wherein the instrument also includes a controller operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare an actual video signal and a desired video signal, and to adjust a DC offset of the DC amplifier so as to reduce a difference between the actual video signal and the desired video signal.

2. An instrument according to claim 1, wherein the controller is operable to interrupt operation of the scanner, to direct the beam to a predetermined portion of the specimen, and to compare the actual video signal produced by the DC amplifier with the desired video signal while the beam is directed to the predetermined portion of the specimen.

3. An instrument according to claim 2, wherein the controller is operable to cause the scanner to direct the beam to the predetermined portion of the specimen.

4. An instrument according to claim 1, wherein the controller is operable to determine when the beam is directed to a predetermined portion of a specimen as the scanner scans the beam relative to the specimen, and to compare the actual video signal produced by the DC amplifier with the desired video signal while the beam is directed to the predetermined portion of the specimen.

5. An instrument according to claim 1, wherein the controller is operable to direct the beam away from the specimen, and to compare the actual video signal produced by the DC amplifier with the desired video signal while the beam is directed away from the specimen.

6. An instrument according to claim 5, wherein the controller is operable, when directing the beam away from the specimen, to cause the beam to impinge on a surface that does not emit or reflect radiation that can be detected by the detector.

7. An instrument according to claim 5, wherein the controller is operable to cause the scanner to direct the beam away from the specimen.

8. An instrument according to claim 5, wherein the instrument further includes an electrostatic beam blanker and the controller is operable to cause the beam blanker to direct the beam away from the specimen.

9. An instrument according to claim 5, wherein the instrument includes a charged particle gun that has at least one gun align coil operable to direct a beam of charged particles through an objective aperture of the charged particle gun, and the controller is operable to direct the beam away from the specimen by preventing the at least one gun align coil from directing the beam of charged particles through the aperture.

10. An instrument according to claim 1, wherein the scanner is operable to scan the beam in a raster pattern relative to the specimen, and the controller is operable to direct the beam away from the specimen during the interval between the end of one line scan of the raster pattern, and the beginning of the next line scan.

11. An instrument according to claim 1, wherein the controller is operable to compare the actual video signal produced by the DC amplifier with the desired video signal and to adjust the DC offset of the DC amplifier at intervals selectable by a user of the instrument.

12. An instrument according to claim 10, wherein the scanner comprises scan coils operable to scan the beam in the raster pattern relative to the specimen, and the controller is operable to compare the actual video signal produced by the DC amplifier with the desired video signal during the line and/or field recovery time of the scan coils.

13. An instrument according to claim 1, wherein the DC amplifier is capacitor-coupled to the radiation detector.

14. An instrument according to claim 1, wherein the instrument further comprises an AC amplifier operable to amplify an AC signal component and block a DC signal component of the signal generated by the detector, the DC amplifier being operable by means of the DC offset to add a DC signal component to the signal produced by the AC amplifier, so as to produce the actual video signal.

15. An instrument according to claim 1, wherein the instrument is a scanning electron microscope (SEM).

16. A method of generating a video signal using a scanning particle beam instrument, the method comprising the steps of directing a beam of charged particles towards a specimen, scanning the beam relative to the specimen, detecting radiation emitted by or reflected from the specimen as a result of scanning by the beam to generate a signal representative of an intensity of the radiation, and amplifying by means of a DC amplifier the signal representative of the intensity of the radiation to produce an actual video signal, wherein the method further comprises the steps of so directing the beam relative to the specimen, or determining when the beam is so directed relative to the specimen, that the actual video signal produced by the DC amplifier may be compared with a desired video signal, comparing an actual video signal and a desired video signal, and adjusting a DC offset of the DC amplifier so as to reduce a difference between the actual video signal and the desired video signal.

17. A method according to claim 16, wherein the steps of so directing the beam relative to the specimen and comparing the actual video signal produced by the DC amplifier with the desired video signal comprise directing the beam to a predetermined portion of the specimen, and comparing the actual video signal produced by the DC amplifier with the desired video signal while the beam is directed to the predetermined portion of the specimen.

18. A method according to claim 16, wherein the steps of so directing the beam relative to the specimen and comparing the actual video signal produced by the DC amplifier with the desired video signal comprise directing the beam away from the specimen, and comparing the actual video signal produced by the DC amplifier with the desired video signal while the beam is directed away from the specimen.

19. A method according to claim 16, wherein the step of directing the beam away from the specimen comprises preventing the beam from reaching the specimen.

20. A method according to claim 16, wherein the step of scanning the beam relative to the specimen comprises scanning the beam in a raster pattern relative to the specimen using scan coils, and the steps of directing the beam away from the specimen and comparing the actual video signal produced by the DC amplifier with the desired video signal are carried out during the line and/or field recovery time of the scan coils.

21. A method according to claim 16, further comprising the step of amplifying an AC signal component and blocking a DC signal component of the signal representative of the instantaneous intensity of the radiation by means of an AC amplifier, and, by means of the offset of the DC amplifier, adding a DC signal component to the signal produced by the AC amplifier so as to produce the actual video signal.