Linear motor, moving stage system, exposure apparatus, and device manufacturing method
First Claim
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1. In a linear motor having a coil and a magnet unit including a plurality of magnets which are disposed along a movement direction and which have magnetic poles disposed with a mutual difference of ninety degrees, the improvement comprising:
- a plurality of magnets provided along a central axis of said coil, and including at least two magnets which are disposed so that tilts of their magnetized directions, with respect to the central axis, which are based on an error of magnetized direction, are placed in mutually opposite directions.
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Abstract
A linear motor includes a coil and a plurality of magnets disposed along a central axis of the coil. The magnetization directions of the plurality of magnets have different tilts with respect to the central axis.
22 Citations
13 Claims
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1. In a linear motor having a coil and a magnet unit including a plurality of magnets which are disposed along a movement direction and which have magnetic poles disposed with a mutual difference of ninety degrees, the improvement comprising:
a plurality of magnets provided along a central axis of said coil, and including at least two magnets which are disposed so that tilts of their magnetized directions, with respect to the central axis, which are based on an error of magnetized direction, are placed in mutually opposite directions. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A linear motor, comprising:
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a plurality of coils disposed along a movement direction of said linear motor; and first and second magnet groups each having a plurality of magnets disposed along the movement direction, wherein said first magnet group includes first magnets disposed at intervals of a magnetic pole pitch, and second magnets being sandwiched by adjacent first magnets, wherein said second magnet group includes third magnets disposed at intervals of a magnetic pole pitch, and fourth magnets being sandwiched by adjacent third magnets, wherein said first magnets and said third magnets are disposed in arrays parallel to a central axis of said coils, and wherein said first magnets and said third magnets are disposed so that tilts of their magnetized directions, with respect to the central axis, which are based on an error of magnetized direction, are placed in mutually opposite directions. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification