Method and post structures for interferometric modulation
First Claim
1. An interferometric modulator comprising a first mirror and a second mirror that define an optical cavity that produces optical interference that can be modulated, at least one of said first and second mirrors supported by a post structure, wherein the post structure comprises an optical element.
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Accused Products
Abstract
An interferometric modulator includes a post structure comprising an optical element. In a preferred embodiment, the optical element in the post structure is a reflective element, e.g., a mirror. In another embodiment, the optical element in the post structure is an etalon, e.g., a dark etalon. The optical element in the post structure may decrease the amount of light that would otherwise be retroreflected from the post structure. In various embodiments, the optical element in the post structure increases the brightness of the interferometric modulator by redirecting light into the interferometric cavity. For example, in certain embodiments, the optical element in the post structure increases the backlighting of the interferometric modulator.
137 Citations
16 Claims
- 1. An interferometric modulator comprising a first mirror and a second mirror that define an optical cavity that produces optical interference that can be modulated, at least one of said first and second mirrors supported by a post structure, wherein the post structure comprises an optical element.
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13. A method for making an interferometric modulator, comprising:
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depositing a reflective layer onto a substrate to form a first mirror; depositing a sacrificial layer over the first mirror; forming apertures in the sacrificial layer; depositing post material into the apertures; forming an optical element over the post material; forming a moveable second mirror over the sacrificial layer and the optical element; and removing the sacrificial layer to thereby form an interferometric cavity. - View Dependent Claims (14, 15, 16)
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Specification