Method for determining properties of a film, and apparatus for realizing the method

• US 7,350,416 B2
• Filed: 07/29/2005
• Issued: 04/01/2008
• Est. Priority Date: 01/28/2005
• Status: Expired due to Fees

• Current Assignee: Guo-Tsai Huang, Pei-Zen Chang, Tsung-Tsong Wu, Yung-Yu Chen
• Original Assignee: Guo-Tsai Huang, Pei-Zen Chang, Tsung-Tsong Wu, Yung-Yu Chen
• Inventors: Chen, Yung-Yu, Huang, Guo-Tsai, Chang, Pei-Zen, Wu, Tsung-Tsong
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): SAINT SURIN, JACQUES M
• Application Number:
  US11/192,664
• Publication Number:
  US 20060172445A1
• Time in Patent Office: 977 Days
• Field of Search: 735/79, 73/240.6, 73/617.5, 310/313.B, 310/313.D, 310/313.R, 333/154
• US Class Current: 73/579
• CPC Class Codes: G01N 2291/012 Phase angle
• CPC Class Codes: G01N 2291/101 one transducer
• CPC Class Codes: G01N 29/043 in the interior, e.g. by shear waves
• CPC Class Codes: G01N 29/075 by measuring or comparing phase angle measuring frequencies or phase angles per se G01R23/00, G01R25/00
• CPC Class Codes: G01N 29/22 Details , e.g. general constructional or apparatus details

Abstract

A method for determining properties or a thin film includes the steps of: providing a piezoelectric substrate; providing a slanted finger interdigital transducer unit that includes a transmitter port and a receiver port on the piezoelectric substrate; forming the thin film on the piezoelectric substrate between the transmitter port and the receiver port; applying an input signal to the transmitter port; and measuring a phase difference, which corresponds to the input signal, from the receiver port. Accordingly, properties of the thin film are determined based on the measured phase difference. An apparatus for realizing the method is also disclosed.

Claims

1. An apparatus for determining properties of a thin film, said apparatus comprising:

a piezoelectric substrate having a surface;

a slanted finger interdigital transducer unit provided on said surface of said piezoelectric substrate, and including

a first transmitter port that includes first and second electrodes, each of which includes a plurality of electrode fingers, each of said electrode fingers of each of said first and second electrodes of said first transmitter port having opposite first and second ends,

said first ends of adjacent ones of said electrode fingers of said first electrode of said first transmitter port defining a distance therebetween that is less than that between said second ends of said adjacent ones of said electrode fingers of said first electrode of said first transmitter port,

said first ends of adjacent ones of said electrode fingers of said second electrode of said first transmitter port defining a distance therebetween that is greater than that between said second ends of said adjacent ones of said electrode fingers of said second electrode of said first transmitter port, and

a first receiver port that includes first and second electrodes, each of which includes a plurality of electrode fingers, each of said electrode fingers of each of said first and second electrodes of said first receiver port having opposite first and second ends,

said first ends of adjacent ones of said electrode fingers of said first electrode of said first receiver port defining a distance therebetween that is less than that between said second ends of said adjacent ones of said electrode fingers of said first electrode of said first receiver port,

said first ends of adjacent ones of said electrode fingers of said second electrode of said first receiver port defining a distance therebetween that is greater than that

between said second ends of said adjacent ones of said electrode fingers of said second electrode of said first receiver port; and

a mask disposed above said surface of said piezoelectric substrate, and defining a hole therethrough to expose a portion of said surface of said piezoelectric substrate between said first transmitter port and said first receiver port.

2. The apparatus as claimed in claim 1, wherein said piezoelectric substrate further has opposite edges, said apparatus further comprising a pair of acoustic absorbers, each of which is provided on said surface of said piezoelectric surface and is disposed at a respective one of said edges of said piezoelectric substrate.

3. The apparatus as claimed in claim 1, wherein said slanted finger interdigital transducer unit further includes

a second transmitter port that includes first and second electrodes, each of which includes a plurality of electrode fingers, each of said electrode fingers of each of said first and second electrodes of said second transmitter port having opposite first and second ends, said first ends of adjacent ones of said electrode fingers of said first electrode of said second transmitter port defining a distance therebetween that is less than that between said second ends of said adjacent ones of said electrode fingers of said first electrode of said second transmitter port,

said first ends of adjacent ones of said electrode fingers of said second electrode of said second transmitter port defining a distance therebetween that is greater than that between said second ends of said adjacent ones of said electrode fingers of said second electrode of said second transmitter port, and

a second receiver port that includes first and second electrodes, each of which includes a plurality of electrode fingers, each of said electrode fingers of each of said first and second electrodes of said second receiver port having opposite first and second ends,

said first ends of adjacent ones of said electrode fingers of said first electrode of said second receiver port defining a distance therebetween that is less than that between said second ends of said adjacent ones of said electrode fingers of said first electrode of said second receiver port,

said first ends of adjacent ones of said electrode fingers of said second electrode of said second receiver port defining a distance therebetween that is greater than that between said second ends of said adjacent ones of said electrode fingers of said second electrode of said second receiver port.

4. The apparatus as claimed in claim 3, wherein said first transmitter port and said first receiver port define a first distance therebetween, said second transmitter port and said second receiver port defining a second distance therebetween that is equal to the first distance between said first transmitter port and said first receiver port.

5. The apparatus as claimed in claim 1, wherein said slanted finger interdigital transducer unit further includes a second receiver port that includes first and second electrodes, each of which includes a plurality of electrode fingers, each of said electrode fingers of each of said first and second electrodes of said second receiver port having opposite first and second ends,

said first ends of adjacent ones of said electrode fingers of said first electrode of said second receiver port defining a distance therebetween that is less than that between said second ends of said adjacent ones of said electrode fingers of said first electrode of said second receiver port,

said first ends of adjacent ones of said electrode fingers of said second electrode of said second receiver port defining a distance therebetween that is greater than that between said second ends of said adjacent ones of said electrode fingers of said second electrode of said second receiver port.