Methods and devices for enhancing bonded substrate yields and regulating temperature
First Claim
1. A fabrication element comprising a body structure that includes two substrates, the body structure having a microchannel network disposed therein and a venting channel disposed therein or at least partially therethrough, the microchannel network disposed within the body structure such that the microchannel network is covered by at least one of the two substrates, the microchannel network comprising a plurality of microchannels, at least two of which microchannels intersect, the venting channel disposed along at least a portion of a side of one or more of the microchannels such that it does not intersect with any microchannel in the microchannel network.
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Accused Products
Abstract
Methods and devices that include the use of venting elements for enhancing bonded substrate yields and regulating temperature. Venting elements are generally fabricated proximal to functionalized regions in substrate surfaces to prevent bond voids that form during bonding processes from affecting the functionalized regions. Venting elements generally include venting channels or networks of channels and/or venting cavities.
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Citations
15 Claims
- 1. A fabrication element comprising a body structure that includes two substrates, the body structure having a microchannel network disposed therein and a venting channel disposed therein or at least partially therethrough, the microchannel network disposed within the body structure such that the microchannel network is covered by at least one of the two substrates, the microchannel network comprising a plurality of microchannels, at least two of which microchannels intersect, the venting channel disposed along at least a portion of a side of one or more of the microchannels such that it does not intersect with any microchannel in the microchannel network.
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15. A fabrication element comprising a body structure formed by bonding together at least a first and a second substrate, at least one of the first and second substrates having a plurality of components disposed therein, the plurality of components including at least one venting channel network disposed within the body structure at the interface of the first and second substrates to vent bond voids between the bonded substrates, the venting channel network comprising at least two intersecting channels, the venting channel network disposed in at least one of the first and second substrates such that it does not intersect with any other component disposed in the first and second substrates.
Specification