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Methods and devices for enhancing bonded substrate yields and regulating temperature

  • US 7,351,377 B2
  • Filed: 06/18/2001
  • Issued: 04/01/2008
  • Est. Priority Date: 06/19/2000
  • Status: Expired due to Term
First Claim
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1. A fabrication element comprising a body structure that includes two substrates, the body structure having a microchannel network disposed therein and a venting channel disposed therein or at least partially therethrough, the microchannel network disposed within the body structure such that the microchannel network is covered by at least one of the two substrates, the microchannel network comprising a plurality of microchannels, at least two of which microchannels intersect, the venting channel disposed along at least a portion of a side of one or more of the microchannels such that it does not intersect with any microchannel in the microchannel network.

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