Semiconductor structures integrating damascene-body FinFET's and planar devices on a common substrate and methods for forming such semiconductor structures
First Claim
1. A method of making a semiconductor structure, the method comprising:
- etching a first trench in a mask on a substrate;
partially filling the first trench with a first epitaxial semiconductor layer;
implanting ions into at least the first epitaxial semiconductor layer;
after the ions are implanted, depositing a second epitaxial semiconductor layer on the first epitaxial semiconductor layer in the first trench to define a semiconductor fin having a channel region;
forming a gate structure intersecting the channel region of the semiconductor fin; and
supporting the semiconductor fin with the mask while forming the gate structure.
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Accused Products
Abstract
Methods of forming a semiconductor structure having FinFET'"'"'s and planar devices, such as MOSFET'"'"'s, on a common substrate by a damascene approach. A semiconductor fin of the FinFET is formed on a substrate with damascene processing in which the fin growth may be interrupted to implant ions that are subsequently transformed into a region that electrically isolates the fin from the substrate. The isolation region is self-aligned with the fin because the mask used to form the damascene-body fin also serves as an implantation mask for the implanted ions. The fin may be supported by the patterned layer during processing that forms the FinFET and, more specifically, the gate of the FinFET. The electrical isolation surrounding the FinFET may also be supplied by a self-aligned process that recesses the substrate about the FinFET and at least partially fills the recess with a dielectric material.
146 Citations
23 Claims
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1. A method of making a semiconductor structure, the method comprising:
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etching a first trench in a mask on a substrate; partially filling the first trench with a first epitaxial semiconductor layer; implanting ions into at least the first epitaxial semiconductor layer; after the ions are implanted, depositing a second epitaxial semiconductor layer on the first epitaxial semiconductor layer in the first trench to define a semiconductor fin having a channel region; forming a gate structure intersecting the channel region of the semiconductor fin; and supporting the semiconductor fin with the mask while forming the gate structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of making a semiconductor structure, the method comprising:
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etching a first trench in a mask on a substrate; forming a semiconductor fin in the first trench, the semiconductor fin having a channel region; forming an isolation region between the semiconductor fin and the substrate after partially forming the semiconductor fin; forming a gate structure intersecting the channel region of the semiconductor fin; and supporting the semiconductor fin with the mask while forming the gate structure. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification