Probe card assembly and kit
First Claim
1. A method of making a probe card assembly for probing a semiconductor wafer, the method comprising:
- providing a probe card having a plurality of first contact terminals;
providing a semiconductor substrate having a plurality of first substrate terminals and second substrate terminals;
providing a plurality of electrical connections connecting selected ones of the plurality of first contact terminals and selected ones of the plurality of first substrate terminals;
providing a plurality of probe elements mounted to the second plurality of substrate terminals; and
providing a movable element that controls an orientation of the substrate with respect to the probe card.
1 Assignment
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Accused Products
Abstract
In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient spring contact. Conductive elements in the space transformer are routed to second contacts at a more relaxed pitch. In one preferred embodiment, the second contacts are suitable for directly attaching a ribbon cable, which in turn can be connected to provide selective connection to each primary contact. The silicon space transformer is mounted in a fixture that provides for resilient connection to a wafer or device to be tested. This fixture can be adjusted to planarize the primary contacts with the plane of a support probe card board.
82 Citations
24 Claims
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1. A method of making a probe card assembly for probing a semiconductor wafer, the method comprising:
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providing a probe card having a plurality of first contact terminals; providing a semiconductor substrate having a plurality of first substrate terminals and second substrate terminals; providing a plurality of electrical connections connecting selected ones of the plurality of first contact terminals and selected ones of the plurality of first substrate terminals; providing a plurality of probe elements mounted to the second plurality of substrate terminals; and providing a movable element that controls an orientation of the substrate with respect to the probe card. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification