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Method for process optimization and control by comparison between 2 or more measured scatterometry signals

  • US 7,352,453 B2
  • Filed: 01/17/2004
  • Issued: 04/01/2008
  • Est. Priority Date: 01/17/2003
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • obtaining scatterometry signals by performing scatterometry measurements on a plurality of grating structures with different process responses, each grating structure having a first grating parameter and the grating structures having different values for the first grating parameter;

    comparing scatterometry signals from said different grating structures in order to ascertain information about one or more process parameters used to form said grating structures; and

    controlling said one or more process parameters based on said comparison, wherein the differences between process responses are attributable at least in part to the differences between the different values for the first grating parameters and wherein the different values for the first grating parameters are selected so as to cause different process responses under the same process parameters.

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