Shape measuring instrument
First Claim
1. A shape measuring instrument, comprising:
- a measuring probe which comes into contact with a surface of a target;
support member configured to support the measuring probe so that an axial direction of the measuring probe is tilted with respect to a horizontal direction and the measuring probe is retracted by a self weight;
biasing member configured to protrude the measuring probe to the side of the target against the self weight; and
a position detector configured to measure an axial position of the measuring probe.
1 Assignment
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Accused Products
Abstract
A shape measuring instrument is provided as being capable of measuring a surface shape of a target with a small contact force while changing the contact force. A measuring probe 32 is supported while a tilt θ is provided. A retracting force of the measuring force 32 is produced by the tilt θ, and thus, is obtained as mgsig θ which is much small as compared with a self weight “m”. On the other hand, biasing is provided with an extruding force Fc by means of an air cylinder 40. Thus, a contact force of the measuring probe 32 relevant to a work piece W is obtained as a difference between a measuring probe self weight tilt component mgsigθ and the extruding force Fc of the air cylinder 40 (F=Fc−mgsigθ), thus making it possible to reduce a contact force to be very small.
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Citations
7 Claims
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1. A shape measuring instrument, comprising:
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a measuring probe which comes into contact with a surface of a target; support member configured to support the measuring probe so that an axial direction of the measuring probe is tilted with respect to a horizontal direction and the measuring probe is retracted by a self weight; biasing member configured to protrude the measuring probe to the side of the target against the self weight; and a position detector configured to measure an axial position of the measuring probe. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A shape measuring instrument, comprising;
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contact means for contacting with a surface of a target; support means for supporting the contact means so that an axial direction of the contact means is tilted with respect to a horizontal direction and the contact means is retracted by a self weight; biasing means for protruding the contact means to the side of the target against the self weight; and position detecting means for measuring an axial position of the contact means.
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Specification