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Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator

  • US 7,353,771 B2
  • Filed: 11/07/2005
  • Issued: 04/08/2008
  • Est. Priority Date: 11/07/2005
  • Status: Active Grant
First Claim
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1. A method of providing power for igniting a plasma in a reactive gas generator, comprising:

  • inductively coupling a power supply remote from a plasma chamber containing a gas capable of being transformed into a plasma, the remote power supply comprising a series resonant circuit coupled between a switching power source and a transformer, the series resonant circuit further comprising a resonant inductor in series with a resonant capacitor and the resonant capacitor in parallel with a transformer primary of the transformer;

    providing a substantially resonant AC voltage from the series resonant circuit across the transformer primary to induce a substantially resonant current within the transformer primary which transforms the gas in the plasma chamber into a plasma secondary of the transformer; and

    upon generation of the plasma secondary, the resonant inductor limiting current flowing to the switching power supply.

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