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Heat sink with microchannel cooling for power devices

  • US 7,353,859 B2
  • Filed: 11/24/2004
  • Issued: 04/08/2008
  • Est. Priority Date: 11/24/2004
  • Status: Expired due to Fees
First Claim
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1. An apparatus for cooling at least one heated surface, said apparatus comprising:

  • a base plate defining a plurality of inlet manifolds and a plurality of outlet manifolds, wherein said inlet manifolds are configured to receive a coolant and said outlet manifolds are configured to exhaust the coolant, and wherein said inlet and outlet manifolds are interleaved and are oriented in a plane of the base plate;

    at least one substrate having an inner surface and an outer surface, wherein said inner surface is coupled to said base plate, wherein said inner surface defines a plurality of microchannels configured to receive the coolant from said inlet manifolds and to deliver the coolant to said outlet manifolds, wherein said microchannels are oriented substantially perpendicular to said inlet and outlet manifolds, and wherein said outer surface is in thermal contact with the heated surface;

    an inlet plenum configured to supply the coolant to said inlet manifolds; and

    an outlet plenum configured to exhaust the coolant from said outlet manifolds, wherein said inlet plenum and said outlet plenum are oriented in the plane of said base plate,wherein said substrate comprises a top metal layer, an insulating microchannel layer and a lower layer, wherein said microchannels are formed in said insulating microchannel layer, wherein said insulating microchannel layer is disposed between said top metal layer and said base plate, wherein said lower layer is disposed between and attached to said insulating microchannel layer and said base plate, and wherein said top metal layer is coupled to the heated surface.

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