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Electrode design and positioning for controlled movement of a moveable electrode and associated support structure

  • US 7,354,787 B2
  • Filed: 03/30/2005
  • Issued: 04/08/2008
  • Est. Priority Date: 04/30/2002
  • Status: Expired due to Fees
First Claim
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1. A method of moving a moving electrode using electrostatic forces comprising:

  • applying a voltage such that a voltage difference is formed between a suspended moving electrode and a fixed electrode positioned laterally adjacent to the moving electrode, the fixed electrode in a first plane on a substrate surface, the applied voltage causing the moving electrode to move in a direction to reduce the distance between at least a portion of the moving electrode and a substrate surface to which a different portion of the moving electrode is coupled, the applied voltage to reduce a bend in the moving electrode thereby straightening the moving electrode, the applied voltage to also adjust the orientation of the moving electrode such that the angle formed between the moving electrode and the first plane is reduced.

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