Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
First Claim
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1. A method of moving a moving electrode using electrostatic forces comprising:
- applying a voltage such that a voltage difference is formed between a suspended moving electrode and a fixed electrode positioned laterally adjacent to the moving electrode, the fixed electrode in a first plane on a substrate surface, the applied voltage causing the moving electrode to move in a direction to reduce the distance between at least a portion of the moving electrode and a substrate surface to which a different portion of the moving electrode is coupled, the applied voltage to reduce a bend in the moving electrode thereby straightening the moving electrode, the applied voltage to also adjust the orientation of the moving electrode such that the angle formed between the moving electrode and the first plane is reduced.
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Abstract
A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
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Citations
16 Claims
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1. A method of moving a moving electrode using electrostatic forces comprising:
applying a voltage such that a voltage difference is formed between a suspended moving electrode and a fixed electrode positioned laterally adjacent to the moving electrode, the fixed electrode in a first plane on a substrate surface, the applied voltage causing the moving electrode to move in a direction to reduce the distance between at least a portion of the moving electrode and a substrate surface to which a different portion of the moving electrode is coupled, the applied voltage to reduce a bend in the moving electrode thereby straightening the moving electrode, the applied voltage to also adjust the orientation of the moving electrode such that the angle formed between the moving electrode and the first plane is reduced. - View Dependent Claims (2, 3, 4, 5)
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6. A method of moving a moveable electrode comprising the operations of:
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applying a voltage to at least one electrode to create a difference in electric potential between a moveable electrode and a fixed electrode in a fixed electrode plane, the fixed electrode positioned laterally adjacent to the moveable electrode; and
,adjusting the difference in electric potential to cause a reduction in curvature of the moveable electrode in a motion plane approximately perpendicular to the fixed electrode plane, the reduction in curvature of the moveable electrode reduces a distance between a portion of the moveable electrode and the fixed electrode plane. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A method of reducing the curvature of a moveable electrode in a MicroElectroMechanical system comprising the operations of:
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determining a desired position of a moveable electrode; applying a voltage to at least one electrode of a moveable electrode and a fixed electrode to create a difference in electric potential between the moveable electrode and the fixed electrode, the fixed electrode in a fixed electrode plane, the fixed electrode positioned laterally adjacent to the moveable electrode; and
,adjusting the difference in electric potential to cause movement and reduce a curvature of the moveable electrode in a motion plane approximately perpendicular to the fixed electrode surface such that the moveable electrode straightens such that the shortest distance between at least a portion of the moveable electrode and the fixed electrode plane is reduced, the difference in electric potential to also adjust the orientation of the moveable electrode such that the angle formed between the moveable electrode and the fixed electrode plane is reduced. - View Dependent Claims (14, 15)
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16. A method of moving a moving electrode using electrostatic forces comprising:
applying a voltage such that a voltage difference is formed between a suspended moving electrode and a fixed electrode positioned laterally adjacent to the moving electrode, the applied voltage causing the moving electrode to have less curvature and move in a direction to reduce the shortest distance between a tip of the moving electrode and a substrate to which a fixed end of the moving electrode is mounted, the voltage difference to change an orientation of the suspended moving electrode to reduce an angle between the substrate to which the fixed end of the moving electrode is mounted and the suspended moving electrode.
Specification