Electrode design and positioning for controlled movement of a moveable electrode and associated support structure

• US 7,354,787 B2
• Filed: 03/30/2005
• Issued: 04/08/2008
• Est. Priority Date: 04/30/2002
• Status: Expired due to Fees

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Volkel, Armin R., Rosa, Michel A., Dunec, John L., Peeters, Eric, Hantschel, Thomas, DeBruyker, Dirk
• Primary Examiner(s): Baumeister; B. William
• Assistant Examiner(s): Fulk; Steven J.
• Application Number:
  US11/096,840
• Publication Number:
  US 20050167769A1
• Time in Patent Office: 1,105 Days
• Field of Search: 438/52, 257/418, 257/E21.327, 200/181
• US Class Current: 438/52
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0008 Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H02N 1/002 Electrostatic motors

Abstract

A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

Claims

1. A method of moving a moving electrode using electrostatic forces comprising:

applying a voltage such that a voltage difference is formed between a suspended moving electrode and a fixed electrode positioned laterally adjacent to the moving electrode, the fixed electrode in a first plane on a substrate surface, the applied voltage causing the moving electrode to move in a direction to reduce the distance between at least a portion of the moving electrode and a substrate surface to which a different portion of the moving electrode is coupled, the applied voltage to reduce a bend in the moving electrode thereby straightening the moving electrode, the applied voltage to also adjust the orientation of the moving electrode such that the angle formed between the moving electrode and the first plane is reduced.

2. The method of claim 1 wherein each electric field that electrostatically moves the moving electrode is a fringe electric field from the fixed electrode.

3. The method of claim 1 wherein at least ninety percent of the top surface of the fixed electrode extends beyond a surface covered by the moving electrode when the moving electrode moves into a plane approximately parallel with the substrate.

4. The method of claim 1 wherein the direction is downward towards the substrate surface.

5. The method of claim 1 wherein the moving electrode is mounted beneath the substrate and beneath the laterally adjacent electrodes and the direction is upwards towards the substrate surface.

6. A method of moving a moveable electrode comprising the operations of:

applying a voltage to at least one electrode to create a difference in electric potential between a moveable electrode and a fixed electrode in a fixed electrode plane, the fixed electrode positioned laterally adjacent to the moveable electrode; and

,

adjusting the difference in electric potential to cause a reduction in curvature of the moveable electrode in a motion plane approximately perpendicular to the fixed electrode plane, the reduction in curvature of the moveable electrode reduces a distance between a portion of the moveable electrode and the fixed electrode plane.

7. The method of claim 6 wherein at least ninety percent of the fixed electrode extends beyond a surfaced covered by the moveable electrode when the moveable electrode moves approximately adjacent the fixed electrode plane.

8. The method of claim 6 wherein the moveable electrode is a cantilever wherein one end of the cantilever is mounted in the fixed electrode plane such that when all curvature is removed from the cantilever, the cantilever is in the fixed electrode plane.

9. The method of claim 6 wherein the difference in electric potential is between 30 and 100 volts.

10. The method of claim 6 wherein the moveable electrode includes a moveable tip, a gradual at least 75 percent decrease in electrode tip distance from the fixed electrode plane achievable over a gradual change in the difference in electric potential exceeding approximately 10 volts, whereas even at maximum voltage, the moveable tip does not contact the fixed electrode plane.

11. The method of claim 6 wherein the moveable electrode is triangular in shape.

12. The method of claim 6 wherein the electric potential changes the orientation of the moveable electrode to reduce an angle formed between the moveable electrode and the fixed electrode plane.

13. A method of reducing the curvature of a moveable electrode in a MicroElectroMechanical system comprising the operations of:

determining a desired position of a moveable electrode;

applying a voltage to at least one electrode of a moveable electrode and a fixed electrode to create a difference in electric potential between the moveable electrode and the fixed electrode, the fixed electrode in a fixed electrode plane, the fixed electrode positioned laterally adjacent to the moveable electrode; and

,

adjusting the difference in electric potential to cause movement and reduce a curvature of the moveable electrode in a motion plane approximately perpendicular to the fixed electrode surface such that the moveable electrode straightens such that the shortest distance between at least a portion of the moveable electrode and the fixed electrode plane is reduced, the difference in electric potential to also adjust the orientation of the moveable electrode such that the angle formed between the moveable electrode and the fixed electrode plane is reduced.

14. The method of claim 13 wherein the moveable electrode is a cantilever that includes a fixed end and a moveable tip.

15. The method of claim 13 wherein the desired position is determined by the height of the moveable tip.

16. A method of moving a moving electrode using electrostatic forces comprising:

applying a voltage such that a voltage difference is formed between a suspended moving electrode and a fixed electrode positioned laterally adjacent to the moving electrode, the applied voltage causing the moving electrode to have less curvature and move in a direction to reduce the shortest distance between a tip of the moving electrode and a substrate to which a fixed end of the moving electrode is mounted, the voltage difference to change an orientation of the suspended moving electrode to reduce an angle between the substrate to which the fixed end of the moving electrode is mounted and the suspended moving electrode.