Systems and methods of controlling micro-electromechanical devices
First Claim
1. A method of making a control circuit for a Micro-Electro-Mechanical System (“
- MEMS”
), the method comprising;
depositing a silicon layer on a substrate;
patterning the deposited silicon layer;
depositing a structural material on the silicon layer;
patterning the deposited structural material to form a source beam, a drain structure, and a gate structure;
plating a non-corroding metal on the deposited structural material; and
etching away at least some of the silicon layer.
4 Assignments
0 Petitions
Accused Products
Abstract
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
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Citations
13 Claims
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1. A method of making a control circuit for a Micro-Electro-Mechanical System (“
- MEMS”
), the method comprising;depositing a silicon layer on a substrate; patterning the deposited silicon layer; depositing a structural material on the silicon layer; patterning the deposited structural material to form a source beam, a drain structure, and a gate structure; plating a non-corroding metal on the deposited structural material; and etching away at least some of the silicon layer. - View Dependent Claims (2, 3, 4, 5)
- MEMS”
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6. A device for controlling a Micro-Electro-Mechanical System (“
- MEMS”
), the device comprising;a silicon layer deposited over a substrate, wherein the silicon layer is patterned and at least some of the silicon layer is etched away; a structural material deposited over the silicon layer, wherein the structural material comprises a source beam, a drain structure, and a gate structure; and a non-corroding metal deposited over the structural material, wherein the non-corroding metal is plated. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
- MEMS”
Specification