Methods and apparatus for data analysis
First Claim
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1. A test system, comprising:
- a tester configured to test a set of components and generate test data for the set of components;
a diagnostic system configured to receive the test data from the tester and automatically analyze the test data to identify a problem in a process for fabricating the components, wherein the diagnostic system is configured to recognize a pattern in the test data and match the recognized pattern with the problem, and wherein the diagnostic system includes a classifier configured to classify the pattern using an evolutionary algorithm.
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Abstract
A method and apparatus for data analysis according to various aspects of the present invention is configured to automatically identify a characteristic of a component fabrication process guided by characteristics of the test data for the components. A method and apparatus according to various aspects of the present invention may operate in conjunction with a test system having a tester, such as automatic test equipment (ATE) for testing semiconductors.
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Citations
19 Claims
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1. A test system, comprising:
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a tester configured to test a set of components and generate test data for the set of components; a diagnostic system configured to receive the test data from the tester and automatically analyze the test data to identify a problem in a process for fabricating the components, wherein the diagnostic system is configured to recognize a pattern in the test data and match the recognized pattern with the problem, and wherein the diagnostic system includes a classifier configured to classify the pattern using an evolutionary algorithm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification