Plug and play sensor integration for a process module

• US 7,356,580 B1
• Filed: 03/30/2000
• Issued: 04/08/2008
• Est. Priority Date: 03/30/2000
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Huang, Chung-Ho, Lui, Andrew, Hemker, David J.
• Primary Examiner(s): Wiley; David
• Assistant Examiner(s): ENGLAND, DAVID E
• Application Number:
  US09/539,313
• Time in Patent Office: 2,931 Days
• Field of Search: 709/200, 709/202, 709/203, 709220-228, 350/100, 702/116, 702/188, 702/31, 702/32, 703/23
• US Class Current: 709/224
• CPC Class Codes: G06F 13/4081 Live connection to bus, e.g. hot-plugging current or voltage limitation during live insertion H02H9/004

Abstract

A process chamber with a computer system that controls the process chamber is connected to one or more sensors, which are used to monitor the process in the process chamber. The sensors are connected to the computer system in a client/server relationship, in a way that allows the sensors to be hot swappable plug and play sensors. The computer system exchanges various messages with the sensors, synchronizes with the sensors, and integrates and utilizes data sent from the sensors.

Claims

1. A computer implemented method for communicating between a computing system of a process module, wherein the process module has a process chamber, and a first sensor, comprising the steps of:

initializing the computing system of the process module;

initializing the first sensor, which is able to measure a first parameter in the process chamber;

transmitting a connect message from the first sensor to the computing system of the process module;

transmitting a command to get reportable specification from the computing system of the process module to the first sensor, the computing system having no prior knowledge of a data type specification transmitted by the first sensor upon the transmitting the command to get the reportable specification;

automatically transmitting, upon receiving the command to get the reportable specification, a reportable specification message from the first sensor to the computing system of the process module, the reportable specification message being configured to inform the computing system of the processing module at least the data type specification transmitted by the first sensor;

transmitting a process related command related to the execution of an action in the process chamber from the computing system of the process module to the first sensor; and

thereafter receiving, using the computing system of the processing module and the reportable specification message received from the first sensor, sensor data from the first sensor.

2. The computer implemented method, as recited in claim 1, further comprising the steps of:

spawning within the computing system of the process module a connection monitor task;

spawning from the connection monitor task within the computing system of the process module a first sensor messaging task;

transmitting an acknowledgement of the command to get reportable specification from the first sensor to the computing system of the process module; and

transmitting an acknowledgement of the reportable specification message from the computing system of the process module to the first sensor.

3. The computer implemented method, as recited in claim 2, further comprising the steps of:

transmitting command to get an alarm table command from the first sensor to the computing system of the process module;

transmitting an acknowledgement of the command to get the alarm table from the computing system of the process module to the first sensor;

transmitting an alarm table from the computing system of the process module to the first sensor, wherein the alarm table designates the number of alarms, alarm identification numbers, and descriptions of the alarms; and

transmitting an acknowledgement of the alarm table from the first sensor to the computing system of the process module.

4. The computer implemented method, as recited in claim 3, further comprising the steps of:

transmitting command to get time and initialization data from the first sensor to the computing system of the process module;

transmitting an acknowledgement of the command to get time and initialization data from the computing system of the process module to the first sensor;

transmitting time and initialization data from the computing system of the process module to the first sensor; and

transmitting an acknowledgement of the time and initialization data from the first sensor to the computing system of the process module.

5. The computer implemented method, as recited in claim 4, further comprising the steps of:

transmitting a process related command related to the execution of an action in the process chamber from the computing system of the process module to the first sensor;

executing the action in the process chamber, wherein said action relates to the processing of semiconductor related devices; and

transmitting an acknowledgement of the process related command from the first sensor to the computing system of the process module.

6. The computer implemented method, as recited in claim 5, further comprising the steps of:

initializing a second sensor, which is able to measure a second parameter in the process chamber;

transmitting a connect message from the second sensor to the computing system of the process module;

transmitting a command to get reportable specification from the computing system of the process module to the second sensor;

transmitting a reportable specification message from the second sensor to the computing system of the process module;

initializing a third sensor, which is able to measure a third parameter in the process chamber;

transmitting a connect message from the third sensor to the computing system of the process module;

transmitting a command to get reportable specification from the computing system of the process module to the third sensor; and

transmitting a reportable specification message from the third sensor to the computing system of the process module.

7. The computer implemented method, as recited in claim 6, further comprising the steps of:

spawning from the connection monitor task within the computing system of the process module a second sensor messaging task;

transmitting an acknowledgement of the command to get reportable specification from the second sensor to the computing system of the process module;

transmitting an acknowledgement of the reportable specification message from the computing system of the process module to the second sensor;

spawning from the connection monitor task within the computing system of the process module a third sensor messaging task;

transmitting an acknowledgement of the command to get reportable specification from the third sensor to the computing system of the process module; and

transmitting an acknowledgement of the reportable specification message from the computing system of the process module to the third sensor.

8. The computer implemented method, as recited in claim 7, further comprising the steps of:

transmitting command to get an alarm table command from the second sensor to the computing system of the process module;

transmitting an acknowledgement of the command to get the alarm table from the computing system of the process module to the second sensor;

transmitting an alarm table from the computing system of the process module to the second sensor;

transmitting an acknowledgement of the alarm table from the second sensor to the computing system of the process module;

transmitting command to get an alarm table command from the third sensor to the computing system of the process module;

transmitting an acknowledgement of the command to get the alarm table from the computing system of the process module to the third sensor;

transmitting an alarm table from the computing system of the process module to the third sensor; and

transmitting an acknowledgement of the alarm table from the third sensor to the computing system of the process module.

9. The computer implemented method, as recited in claim 8, further comprising the steps of:

transmitting command to get time and initialization data from the second sensor to the computing system of the process module;

transmitting an acknowledgement of the command to get time and initialization data from the computing system of the process module to the second sensor;

transmitting time and initialization data from the computing system of the process module to the second sensor;

transmitting an acknowledgement of the time and initialization data from the second sensor to the computing system of the process module;

transmitting command to get time and initialization data from the third sensor to the computing system of the process module;

transmitting an acknowledgement of the command to get time and initialization data from the computing system of the process module to the third sensor;

transmitting time and initialization data from the computing system of the process module to the third sensor; and

transmitting an acknowledgement of the time and initialization data from the third sensor to the computing system of the process module.

10. The computer implemented method, as recited in claim 1, wherein the reportable specification also provides possible range of data and frequency of data that will be provided from the sensor.

11. The computer implemented method, as recited in claim 10, wherein the reportable specification further provides whether the data needs to be requested from the sensor or will be automatically sent.