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Sensor chip and apparatus for tactile and/or flow sensing

  • US 7,357,035 B2
  • Filed: 06/04/2004
  • Issued: 04/15/2008
  • Est. Priority Date: 06/06/2003
  • Status: Active Grant
First Claim
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1. A sensor chip comprising:

  • a flexible, polymer-based substrate;

    at least one microfabricated sensor disposed on said substrate and including a conductive element, said at least one sensor comprising at least one of a tactile sensor and a flow sensor;

    a processor coupled to said at least one sensor for processing signals from said at least one sensor;

    wherein said processor is silicon based, and is embedded on a back surface of said substrate.

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