Thin array plastic package without die attach pad and process for fabricating the same
First Claim
1. A process for fabricating an integrated circuit package, comprising:
- selectively plating up metal on a substrate to provide a plurality of contacts pads and a plurality of fiducial markings on a periphery of said contact pads;
selectively depositing a transparent mask on said substrate, over said fiducial markings;
mounting a semiconductor die on said substrate such that said contact pads circumscribe said semiconductor die;
wire bonding said semiconductor die to ones of the contact pads;
encapsulating the wire bonds and covering the semiconductor die and contact pads in a molding material;
thereby etching away the substrate underneath said contact pads and said semiconductor die;
singulating said integrated circuit package from other integrated circuit packages by sawing using said fiducial markings.
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0 Petitions
Accused Products
Abstract
A process for fabricating an integrated circuit package. Metal is plated up on a substrate to provide a plurality of contact pads and a plurality of fiducial markings on a periphery of the contacts. A transparent mask is selectively deposited on the substrate, over the fiducial markings. A semiconductor die is mounted on the substrate such that the contact pads circumscribe the semiconductor die and the semiconductor die is wire bonded to ones of the contact pads. The wire bonds are encapsulated and the semiconductor die and contact pads are covered in a molding material. The substrate is selectively etched to thereby etch away the substrate underneath the contact pads and the semiconductor die. The integrated circuit package is singulated from other integrated circuit packages by sawing using the fiducial markings.
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Citations
24 Claims
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1. A process for fabricating an integrated circuit package, comprising:
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selectively plating up metal on a substrate to provide a plurality of contacts pads and a plurality of fiducial markings on a periphery of said contact pads; selectively depositing a transparent mask on said substrate, over said fiducial markings; mounting a semiconductor die on said substrate such that said contact pads circumscribe said semiconductor die; wire bonding said semiconductor die to ones of the contact pads; encapsulating the wire bonds and covering the semiconductor die and contact pads in a molding material; thereby etching away the substrate underneath said contact pads and said semiconductor die; singulating said integrated circuit package from other integrated circuit packages by sawing using said fiducial markings. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A process for fabricating a plurality of integrated circuit packages comprising:
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selectively plating up metal on a substrate to provide a plurality of sets of contacts pds; mounting a plurality of semiconductor dice on said substrate, each one of said semiconductor dice being circumscribed by a respective one of said sets of contact pads; wire bonding said semiconductor dice to contact pads of respective ones of said sets of contact pads; encapsulating said wire bonds and covering the semiconductor dice and sets of contact pads in a molding material; selectively etching said substrate thereby etching away the substrate underneath said contact pads and said semiconductor dice; mounting said substrate to a tape in a void in a carrier frame; singulating said integrated circuit packages by sawing through said molding material and said substrate without sawing entirely through said tape and said carrier to provide a plurality of integrated circuit packages. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A strip including a plurality of integrated circuit packages, the strip comprising:
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a plurality of semiconductor dice; a plurality of sets of contact pads, each set of contact pads circumscribing a respective one of said semiconductor dice; a plurality of wire bonds connecting said semiconductor dice to contact pads of respective ones of said sets of contact pads; a molding material encapsulating said wire bonds and covering the semiconductor dice and sets of contact pads; a substrate extending around a margin of said molding material, the substrate having an aperture therein in which a surfaces of said contact pads and said molding material are exposed; a plurality of fiducial markings on said substrate; a carrier backed by a tape, said substrate being mounted in a void in said carrier, to said tape; and a plurality of saw grooves singulating said integrated circuit packages, wherein said saw grooves extend through said molding material and said substrate, ending at said tape such that said saw grooves extend at most only partly through said tape. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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Specification