Split gate flash memory cell and manufacturing method thereof
First Claim
1. A fabrication method for a split gate flash memory cell, comprising:
- providing a substrate, wherein the substrate is already formed with a device isolation structure;
forming a selective gate structure on the substrate, the selective gate structure comprises a gate dielectric layer, a conductive layer and a cap layer;
forming a spacer on a sidewall of the selective gate structure;
forming a source region and a drain region in the substrate beside both sides of the selective gate structure, wherein the source region is at a certain distance away from the selective gate structure, and the drain region is adjacent to the selective gate structure;
forming an interlayer dielectric layer on the substrate;
forming an opening in the interlayer dielectric layer, wherein the opening exposes the substrate between the selective gate structure and the source region, a portion of the selective gate structure and the device isolation structure;
forming a tunneling dielectric layer on the substrate that is exposed by the opening;
forming a floating gate in the opening, wherein the floating gate extends to a part of the interlayer dielectric layer;
forming a gate dielectric layer on the substrate; and
forming a control gate on the substrate, wherein the control gate fills the opening.
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Accused Products
Abstract
A split gate flash memory cell includes a substrate having a device isolation structure; a selective gate structure disposed on the substrate; an interlayer dielectric layer having an opening disposed on the substrate, wherein the opening exposes a portion of the selective gate structure, the substrate and the device isolation structure; a floating gate disposed in the opening and extended to cover a surface of the interlayer dielectric layer; a tunneling dielectric layer disposed between the floating gate and the selective gate structure; a gate dielectric layer disposed between the floating gate and the control gate; a source region disposed in the substrate on one side of the control gate that is not adjacent to the selective gate structure, and a drain region disposed in the substrate on one side of the selective gate that is not adjacent to the control gate.
12 Citations
10 Claims
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1. A fabrication method for a split gate flash memory cell, comprising:
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providing a substrate, wherein the substrate is already formed with a device isolation structure; forming a selective gate structure on the substrate, the selective gate structure comprises a gate dielectric layer, a conductive layer and a cap layer; forming a spacer on a sidewall of the selective gate structure; forming a source region and a drain region in the substrate beside both sides of the selective gate structure, wherein the source region is at a certain distance away from the selective gate structure, and the drain region is adjacent to the selective gate structure; forming an interlayer dielectric layer on the substrate; forming an opening in the interlayer dielectric layer, wherein the opening exposes the substrate between the selective gate structure and the source region, a portion of the selective gate structure and the device isolation structure; forming a tunneling dielectric layer on the substrate that is exposed by the opening; forming a floating gate in the opening, wherein the floating gate extends to a part of the interlayer dielectric layer; forming a gate dielectric layer on the substrate; and forming a control gate on the substrate, wherein the control gate fills the opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification