Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device

• US 7,358,722 B2
• Filed: 10/02/2006
• Issued: 04/15/2008
• Est. Priority Date: 06/03/2004
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Peczalski, Andrzej, Detry, James F, Wan, Hong, Witcraft, William F
• Primary Examiner(s): Aurora, Reena
• Assistant Examiner(s): WHITTINGTON, KENNETH
• Application Number:
  US11/537,813
• Publication Number:
  US 20070035294A1
• Time in Patent Office: 561 Days
• Field of Search: 324/244, 324/247, 324/249, 324/251, 324/252, 324/260, 324/262, 338/32.R, 338/32.H
• US Class Current: 324/247
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01R 33/02 Measuring direction or magnitude of magnetic fields or magnetic flux G01R33/20 takes precedence
• CPC Class Codes: G01R 33/0206 Three-component magnetometers
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00

Abstract

An integrated three-dimensional magnetic or any field sensing device and a method to fabricate an integrated three-dimensional magnetic sensing device is presented. An integrated three-dimensional magnetic sensing device comprises an apparatus that defines at least a first surface area and at least one sloped surface which is sloped with respect to the first surface area. Two magnetic sensing units could be arranged on the first surface area to provide first and second orthogonal sensing directions, and a third magnetic sensing unit could be arranged on the at least one sloped surface to provide sensing in at least a third sensing direction which is orthogonal to the first and second orthogonal sensing directions. Bias could be applied to the third magnetic sensing unit to cancel a component of the magnetic field sensed by the third magnetic sensing unit so that the third magnetic sensor unit only provides sensing in the third direction.

Claims

1. A method of fabricating an integrated three-dimensional magnetic sensing device, the method comprising:

etching a substrate to form at least one sloped surface of the substrate, wherein the at least one sloped surface is sloped with respect to a first surface area of the substrate and with respect to a second surface area of the substrate;

forming a first magnetic sensor unit on the first surface area of the substrate such that the first magnetic sensor unit senses a component of a magnetic field in a first direction, wherein forming the first magnetic sensor unit comprises depositing a first set of magnetoresistive strips on the first surface area of the substrate and depositing a first set of conductive straps on the first set of magnetoresistive strips, wherein the first set of conductive straps are arranged to form an angle of approximately 45 degrees with respect to the first set of magnetoresistive strips;

forming a second magnetic sensor unit on the second surface area of the substrate such that the second magnetic sensor unit senses a component of a magnetic field in a second direction, wherein forming the second magnetic sensor unit comprises depositing a second set of magnetoresistive strips on the second surface area of the substrate and depositing a second set of conductive straps on the second set of magnetoresistive strips, wherein the second set of conductive straps are arranged to form an angle of approximately 45 degrees with respect to the second set of magnetoresistive strips; and

forming a third magnetic sensor unit on the at least one sloped surface of the substrate such that the third magnetic sensor unit senses a component of a magnetic field in a third direction, wherein forming the third magnetic sensor unit comprises depositing a third set of magnetoresistive strips on the at least one sloped surface of the substrate and depositing a third set of conductive straps on the third set of magnetoresistive strips, wherein the third set of conductive straps are arranged to form an angle of approximately 45 degrees with respect to the third set of magnetoresistive strips,

wherein the first direction, the second direction, and the third direction are mutually orthogonal directions, and

wherein the first set of conductive straps provide a linear operating range for the first set of magnetoresistive strips, the second set of conductive straps provide a linear operating range for the second set of magnetoresistive strips, and the third set of conductive straps provides a linear operating range for the third set of magnetoresistive strips.

2. The method of claim 1, further comprising:

arranging a conductor in proximity to the third magnetic sensor unit,

wherein passing a current through the conductor aligns a magnetization vector of the third magnetic sensor unit.

3. The method of claim 2, further comprising:

coupling interconnections to the first set of magnetoresistive strips to form a first resistor bridge network;

coupling interconnections to the second set of magnetoresistive strips to form a second resistor bridge network; and

coupling interconnections to the third set of magnetoresistive strips to form a third resistor bridge network.

4. The method of claim 1 wherein etching the substrate to form the at least one sloped surface of the substrate comprises etching a semiconductor chip via KOH etching.

5. The method of claim 1 wherein etching the substrate to form the at least one sloped surface of the substrate comprises etching the substrate via KOH etching.

6. A method of fabricating an integrated three-dimensional magnetic sensing device, the method comprising:

etching a substrate to form at least one sloped surface of the substrate, wherein the at least one sloped surface is sloped with respect to a first surface area of the substrate and with respect to a second surface area of the substrate, wherein the at least one sloped surface includes a first sloped surface and a second sloped surface, and wherein the first sloped surface is opposite the second sloped surface;

forming a first magnetic sensor on the first surface area of the substrate such that the first magnetic sensor senses a component of a magnetic field in a first direction;

forming a second magnetic sensor on the second surface area of the substrate such that the second magnetic sensor senses a component of a magnetic field in a second direction;

forming a third magnetic sensor on the at least one sloped surface of the substrate such that the third magnetic sensor senses a component of a magnetic field in a third direction, wherein the first direction, the second direction, and the third direction are mutually orthogonal, and wherein the third direction is vertical to the first surface area and the second surface area; and

arranging on the third magnetic sensor a biasing means for cancelling at the third magnetic sensor magnetic field components parallel to the first surface area and the second surface area,

whereby the third magnetic sensor detects components of the magnetic field in the third direction.

7. A three-dimensional magnetic sensing device comprising:

a substrate comprising a first surface area, a second surface area, a first sloped surface, and a second sloped surface, wherein the first sloped surface is opposite the second sloped surface, and the first sloped surface and the second sloped surface are sloped with respect to the first surface area and the second surface area;

a first magnetic sensor that senses a component of a magnetic field in a first direction, wherein the first magnetic sensor is located on the first surface area;

a second magnetic sensor that senses a component of the magnetic field in a second direction, wherein the second magnetic sensor is located on the second surface area;

a third magnetic sensor that senses a component of the magnetic field in a third direction, wherein a first part of the third magnetic sensor is located on the first sloped surface and a second part of the third magnetic sensor is located on the second sloped surface; and

a biasing device located on the third magnetic sensor, wherein the biasing device cancels at the third magnetic sensor magnetic field components parallel to the first surface and the second surface,

wherein the third direction is perpendicular to the first surface area and the second surface area, and

wherein the first direction, the second direction, and the third direction are mutually orthogonal directions.

8. The three-dimensional magnetic sensing device of claim 7, wherein the first sloped surface and the second sloped surface are formed by etching the substrate via KOH etching.

9. The three-dimensional magnetic sensing device of claim 7, wherein the first magnetic sensor comprises a first Hall-effect sensor, the second magnetic sensor comprises a second Hall-effect sensor, and the third magnetic sensor comprises a third Hall-effect sensor.

10. The three-dimensional magnetic sensing device of claim 7, wherein the first magnetic sensor comprises a first giant magnetoresistive sensor, the second magnetic sensor comprises a second giant magnetoresistive sensor, and the third magnetic sensor comprises a third giant magnetoresistive sensor.

11. The three-dimensional magnetic sensing device of claim 7, wherein the first magnetic sensor comprises a first spin tunnel device sensor, the second magnetic sensor comprises a second spin tunnel device sensor, and the third magnetic sensor comprises a third spin tunnel device sensor.

12. The three-dimensional magnetic sensing device of claim 7, wherein the first magnetic sensor comprises a first giant magneto-impedance sensor, the second magnetic sensor comprises a second giant magneto-impedance sensor, and the third magnetic sensor comprises a third giant magneto-impedance sensor.

13. The three-dimensional magnetic sensing device of claim 7,

wherein the third magnetic sensor comprises:

(i) a first magnetoresistive strip on a first sloped surface area of the at least one sloped surface area, (ii) a second magnetoresistive strip on the first sloped surface area of the at least one sloped surface area, (iii) a third magnetoresistive strip on a second sloped surface area of the at least one sloped surface area, and (iv) a fourth magnetoresistive strip on the second sloped surface area of the at least one sloped surface area,

wherein the biasing device comprises a plurality of conductive straps including a first set of conductive straps, a second set of conductive straps, a third set of conductive straps, and a fourth set of conductive straps,

wherein the first set of conductive straps are placed across the first magnetoresistive strip so as to form an angle of approximately 45 degrees with respect to long ends of the first magnetoresistive strip,

wherein the second set of conductive straps are placed across the second magnetoresistive strip so as to form an angle of approximately 45 degrees with respect to long ends of the second magnetoresistive strip,

wherein the third set of conductive straps are placed on the third magnetoresistive strip so as to form an angle of approximately 45 degrees with respect to long ends of the third magnetoresistive strip,

wherein the fourth set of conductive straps are placed across the fourth magnetoresistive strip so as to form an angle of approximately 45 degrees with respect to long ends of the fourth magnetoresistive strip.

14. A three-dimensional magnetic sensing device comprising:

a substrate comprising a first surface area, a second surface area, and at least one sloped surface that is sloped with respect to the first surface area and the second surface area;

a first magnetic sensor comprising;

(i) a first set of magnetoresistive strips deposited on the first surface area of the substrate, and (ii) a first set of conductive straps deposited on the first set of magnetoresistive strips, wherein each conductive strap of the first set of conductive straps forms an angle of approximately 45 degrees with respect to a long edge of the magnetoresistive strip to which the conductive strap is deposited, and wherein the first magnetic sensor senses a component of a magnetic field in a first direction;

a second magnetic sensor comprising;

(i) a second set of magnetoresistive strips deposited on the second surface area of the substrate, and (ii) a second set of conductive straps deposited on the second set of magnetoresistive strips, wherein each conductive strap of the second set of conductive straps forms an angle of approximately 45 degrees with respect to a long edge of the magnetoresistive strip to which the conductive strap is deposited, and wherein the second magnetic sensor senses a component of a magnetic field in a second direction;

a third magnetic sensor comprising;

(i) a third set of magnetoresistive strips deposited on the at least one sloped surface of the substrate, and (ii) a third set of conductive straps deposited on the third set of magnetoresistive strips, wherein each conductive strap of the third set of conductive straps forms an angle of approximately 45 degrees with respect to a long edge of the magnetoresistive strip to which the conductive strap is deposited, and wherein the third magnetic sensor senses a component of a magnetic field in a third direction;

wherein the first direction, the second direction, and the third direction are mutually orthogonal.

15. The three-dimensional magnetic sensing device of claim 14,

wherein the first magnetic sensor further comprises a first set of interconnections to couple the first plurality of magnetoresistive strips as a first electrical circuit,

wherein the second magnetic sensor further comprises a second set of interconnections to couple the second plurality of magnetoresistive strips as a second electrical circuit, and

wherein the third magnetic sensor further comprises a third set of interconnections to couple the third plurality of magnetoresistive strips as a third electrical circuit.

16. The three-dimensional magnetic sensing device of claim 15,

wherein the first electrical circuit is arranged as a first Wheatstone bridge circuit,

wherein the second electrical circuit is arranged as a second Wheatstone bridge circuit, and

wherein the third electrical circuit is arranged as a third Wheatstone bridge circuit.

17. The three-dimensional magnetic sensing device of claim 14, wherein the second surface is formed by performing KOH etching to the substrate.

18. The three-dimensional magnetic sensing device of claim 14, wherein the first set of magnetoresistive strips, the second set of magnetoresistive strips, and the third set of magnetoresistive strips comprise a magnetoresistive material selected from the group consisting of:

(i) anisotropic magnetoresistive (AMR) material, (ii) giant magnetoresistive (GMR) material, and (iii) colossal magnetoresistive (CMR) material.

19. The three-dimensional magnetic sensing device of claim 14,

wherein the first magnetic sensor comprises a sensor selected from the group consisting of:

(i) a first Hall-effect sensor, (ii) a first giant magnetoresistive sensor, (iii) a first spin tunnel device sensor, and (iv) a first giant magneto-impedance device sensor,

wherein the second magnetic sensor comprises a sensor selected from the group consisting of;

(i) a second Hall-effect sensor, (ii) a second giant magnetoresistive sensor, (iii) a second spin tunnel device sensor, and (iv) a second giant magneto-impedance device sensor, and

wherein the third magnetic sensor comprises a sensor selected from the group consisting of;

(i) a third Hall-effect sensor, (ii) a third giant magnetoresistive sensor, (iii) a third spin tunnel device sensor, and (iv) a third giant magneto-impedance device sensor.