Miniature fourier transform spectrophotometer
First Claim
1. A miniature Fourier transform spectrophotometer comprising:
- a substrate;
a Michelson interferometer comprising a cube beamsplitter monolithically integrated with an optical path length modulator, the cube beamsplitter comprising a static path side and a differential path side, the optical path length modulator comprising;
a multi-stepped mirror array in physical contact with the differential path side of the cube beamsplitter, comprising a plurality of stepped mirror elements, the stepped mirror elements having a step height, the step height being a function of x-direction step position and y-direction step position on the multi-stepped mirror array; and
,a stationary mirror in physical contact with the static path side of the cube beam splitter;
a detector; and
,wherein said Michelson interferometer, said multi-stepped mirror array, said stationary mirror, and said detector form a Fourier transform spectrophotometer.
1 Assignment
0 Petitions
Accused Products
Abstract
The Miniature Fourier Transform Spectrophotometer provides the capability, in a miniaturized device, of determining the light absorption/transmission spectra of a collected sample of gas or liquid though Fourier Transform spectroscopy techniques. The device takes an optical input from an optical fiber, manipulates that light through miniature optical components, and launches it into a miniaturized Michelson interferometer with a scanning mirror that acquires the interferogram of the optical input. The interferogram can be processed to retrieve the spectrum of the input light. A novel multi-stepped micro-mirror operates as the optical path length modulator in the miniaturized interferometer. A unique monolithic beamsplitter/mirror combination provides for accurate alignment of the components and greatly simplifies product integration. The device is designed to cover various optical spectra of interest. During operation, the precision and accuracy of the microfabricated components in the device allow operation and resolution even at extremely low wavelengths. In addition, the miniaturized nature of the device allows it to be used in new and extremely space-constrained applications.
-
Citations
15 Claims
-
1. A miniature Fourier transform spectrophotometer comprising:
-
a substrate; a Michelson interferometer comprising a cube beamsplitter monolithically integrated with an optical path length modulator, the cube beamsplitter comprising a static path side and a differential path side, the optical path length modulator comprising; a multi-stepped mirror array in physical contact with the differential path side of the cube beamsplitter, comprising a plurality of stepped mirror elements, the stepped mirror elements having a step height, the step height being a function of x-direction step position and y-direction step position on the multi-stepped mirror array; and
,a stationary mirror in physical contact with the static path side of the cube beam splitter; a detector; and
,wherein said Michelson interferometer, said multi-stepped mirror array, said stationary mirror, and said detector form a Fourier transform spectrophotometer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
Specification