Fluid sensor including an error detection device
First Claim
1. A fluid sensor for detecting fluid media, comprising:
- a sensor chip having a chip surface which can be exposed to the fluid medium, the chip surface having a measuring surface and a body surface, and having printed conductors of a central sensor circuit having at least one heating element and at least one temperature sensor situated on the measuring surface;
at least one fracture detection element situated on the sensor chip; and
a fracture detection circuit for detecting at least one of (a) fractures and (b) cracks, in and/or on the sensor chip.
1 Assignment
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Accused Products
Abstract
A fluid sensor may be used for detecting fluid media, in particular hydrogen. The fluid sensor includes a sensor chip having a chip surface, which has a measuring surface and a body surface. Printed conductors of a central sensor circuit having at least one heating element and at least one temperature sensor are provided on the measuring surface. Furthermore, the fluid sensor has one additional fracture detection element and one fracture detection circuit situated on the sensor chip. The fracture detection circuit is designed for detecting fractures and/or cracks in and/or on the sensor chip, in particular in the area of a boundary between the measuring surface and body surface.
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Citations
16 Claims
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1. A fluid sensor for detecting fluid media, comprising:
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a sensor chip having a chip surface which can be exposed to the fluid medium, the chip surface having a measuring surface and a body surface, and having printed conductors of a central sensor circuit having at least one heating element and at least one temperature sensor situated on the measuring surface; at least one fracture detection element situated on the sensor chip; and a fracture detection circuit for detecting at least one of (a) fractures and (b) cracks, in and/or on the sensor chip. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification