Resonating star gyroscope
First Claim
1. Apparatus, comprising:
- a substrate; and
resonator apparatus comprising;
a support member connected to the substrate;
multiple flexural springs coupled to the support member and separated from the substrate that extend outwardly from the support member;
a star-shaped resonator coupled to ends of the flexural springs distal from the support member and separated from the substrate; and
drive and sense electrodes surrounding the star-shaped resonator.
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Accused Products
Abstract
Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type structure for rate sensing or measuring angle of rotation. The structure formed as a merged superposition of two square entities, yields in-plane degenerate flexural modes that are used to sense rotation around the axis perpendicular to the substrate. The resonating star gyroscope may be implemented using the primary flexural degenerate modes. Such an implementation has been successfully demonstrated by the authors using trench-refilled polysilicon and epitaxial polysilicon as the structural material. It is also possible to use a solid star-shaped resonator (with or without perforations) for the gyroscope. The authors also suggest the operation of the resonating star gyroscope employing the higher-order flexural modes. In this particular implementation the authors utilized a (100) single crystalline structural material.
54 Citations
22 Claims
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1. Apparatus, comprising:
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a substrate; and resonator apparatus comprising; a support member connected to the substrate; multiple flexural springs coupled to the support member and separated from the substrate that extend outwardly from the support member; a star-shaped resonator coupled to ends of the flexural springs distal from the support member and separated from the substrate; and drive and sense electrodes surrounding the star-shaped resonator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. Apparatus, comprising:
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a substrate; and resonator apparatus comprising; a support member connected to the substrate; a multi-faceted star-shaped resonator coupled to the support member and separated from the substrate; and drive and sense electrodes surrounding the star-shaped resonator. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification