Inkjet printhead chip with nozzle assemblies incorporating fluidic seals

• US 7,360,872 B2
• Filed: 12/15/2004
• Issued: 04/22/2008
• Est. Priority Date: 07/15/1997
• Status: Expired due to Fees

• Current Assignee: Zamtec Limited (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Primary Examiner(s): Luu; Matthew
• Assistant Examiner(s): SOLOMON, LISA
• Application Number:
  US11/012,024
• Publication Number:
  US 20050179733A1
• Time in Patent Office: 1,224 Days
• Field of Search: 347/20, 347/40, 347/42, 347/54, 347/56
• US Class Current: 347/54
• CPC Class Codes: B41J 2/14 Structure thereof only for on-demand ink jet heads
• CPC Class Codes: B41J 2/14314 Structure of ink jet print heads with electrostatically actuated membrane
• CPC Class Codes: B41J 2/16 Production of nozzles
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1632 machining
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1637 molding
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1643 thin film formation by plating
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2/16585 for paper-width or non-reciprocating print heads
• CPC Class Codes: B41J 2/17513 Inner structure
• CPC Class Codes: B41J 2/17596 Ink pumps, ink valves
• CPC Class Codes: B41J 2002/041 Electromagnetic transducer
• CPC Class Codes: B41J 2202/21 : Line printing
• CPC Class Codes: G06F 21/79 : in semiconductor storage media, e.g. directly-addressable memories
• CPC Class Codes: G06F 21/86 : Secure or tamper-resistant housings
• CPC Class Codes: G06F 2221/2129 : Authenticate client device independently of the user
• CPC Class Codes: G06K 1/121 : by printing code marks applying code marks to labels B65C9/46; marking or coding completed packages B65B61/26
• CPC Class Codes: G06K 19/06037 : multi-dimensional coding
• CPC Class Codes: G06K 7/14 : using light without selection of wavelength, e.g. sensing reflected white light G06K7/10831 - G06K7/1097 take precedence
• CPC Class Codes: G06K 7/1417 : 2D bar codes
• CPC Class Codes: G11C 11/56 : using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
• CPC Class Codes: H04N 23/00 : Cameras or camera modules comprising electronic image sensors; Control thereof
• CPC Class Codes: H04N 5/2628 : Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation

Abstract

An inkjet printhead chip includes a wafer substrate that defines a plurality of ink inlet channels. A drive circuitry layer is positioned on the wafer substrate. A plurality of nozzle assemblies is positioned on the wafer substrate. Each nozzle assembly includes a nozzle chamber structure that comprises a fixed portion that bounds a respective ink inlet channel and a movable portion. The fixed and movable portions define a nozzle chamber in fluid communication with the ink inlet channel. The movable portion defines an ink ejection port and is movable relative to the fixed portion so that ink is ejected from the ink ejection port. Peripheries of the fixed and movable portions are shaped and relatively positioned so that ink in the nozzle chamber establishes a meniscus between the peripheries that defines a fluidic seal to inhibit the egress of ink during operation. An actuator is connected to the drive circuitry layer to receive an electrical signal from the drive circuitry layer and is arranged to act on the movable portion to displace the movable portion with respect to the fixed portion on receipt of the electrical signal.

Claims

1. An inkjet printhead chip which comprises

a wafer substrate that defines a plurality of ink inlet channels;

a drive circuitry layer positioned on the wafer substrate; and

a plurality of nozzle assemblies positioned on the wafer substrate, each nozzle assembly comprising

a nozzle chamber structure that comprises a fixed wall portion that bounds a respective ink inlet channel, and a movable roof portion, the fixed and movable portions defining a walls and a roof of a nozzle chamber in fluid communication with the ink inlet channel, the movable roof portion having an ink ejection port defined therethrough and being movable relative to the fixed portion to thereby cause ejection of ink from the ink ejection port, the fixed and movable portions being shaped and relatively positioned so that ink in the nozzle chamber establishes a meniscus between the fixed and moveable portions that defines a fluidic seal to inhibit the egress of ink during operation; and

an actuator arm that is connected, at one end, to the drive circuitry layer to receive an electrical signal from the drive circuitry layer to cause displacement of the actuator arm relative to the drive circuitry layer, and at the other end, to the movable portion to displace the movable portion with respect to the fixed portion on receipt of the electrical signal.

2. An ink jet printhead chip as claimed in claim 1, in which each movable portion comprises a crown portion with a skirt portion that depends from the crown portion, the skirt portion and the fixed wall portion defining a peripheral wall of the respective nozzle chamber and the ink ejection port being defined in the respective crown portion.