Method of registering a spacer with a conducting track
First Claim
1. A method of producing a relief structure on a patterned conductor comprising the steps of:
- coating a layer of conductive material onto a transparent substrate;
coating a layer of metal onto the layer of conductive material;
coating a layer of photoresist onto the layer of metal;
curing the layer of photoresist;
exposing, through a first mask, a desired pattern of transparent conductors onto the layer of photoresist;
developing the photoresist and simultaneously etching the layer of the conductive material and the layer of metal;
exposing, through a second mask, a desired pattern of metal conductors onto the remaining layer of photoresist;
developing the photoresist and etching the layer of metal,applying a further layer of photoresist;
curing the further layer of photoresist;
exposing the further layer of photoresist thorough the substrate; and
developing the photoresist and allowing the layer to dry, resulting in a pattern of spacers/reliefs in registration with the metal conductors.
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Accused Products
Abstract
A method of producing a relief structure on a patterned conductor comprises the steps of; coating a layer of conductive material onto a transparent substrate, coating a layer of metal onto the layer of conductive material, coating a layer of photoresist onto the layer of metal, curing the layer of photoresist, exposing a desired pattern of transparent conductors through a first mask onto the layer of photoresist, developing the photoresist and simultaneously etching the layer of the conductive material and the layer of metal, exposing a desired pattern of metal conductors through a second mask onto the remaining layer of photoresist, developing the photoresist and etching the layer of metal, applying a further layer of photoresist, curing the further layer of photoresist, exposing the further layer of photoresist thorough the substrate, developing the photoresist and allowing the layer to dry, resulting in a pattern of spacers/reliefs in registration with the metal conductors.
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Citations
6 Claims
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1. A method of producing a relief structure on a patterned conductor comprising the steps of:
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coating a layer of conductive material onto a transparent substrate; coating a layer of metal onto the layer of conductive material; coating a layer of photoresist onto the layer of metal; curing the layer of photoresist; exposing, through a first mask, a desired pattern of transparent conductors onto the layer of photoresist; developing the photoresist and simultaneously etching the layer of the conductive material and the layer of metal; exposing, through a second mask, a desired pattern of metal conductors onto the remaining layer of photoresist; developing the photoresist and etching the layer of metal, applying a further layer of photoresist; curing the further layer of photoresist; exposing the further layer of photoresist thorough the substrate; and developing the photoresist and allowing the layer to dry, resulting in a pattern of spacers/reliefs in registration with the metal conductors. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification