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Method of registering a spacer with a conducting track

  • US 7,361,379 B2
  • Filed: 03/01/2006
  • Issued: 04/22/2008
  • Est. Priority Date: 03/02/2005
  • Status: Expired due to Fees
First Claim
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1. A method of producing a relief structure on a patterned conductor comprising the steps of:

  • coating a layer of conductive material onto a transparent substrate;

    coating a layer of metal onto the layer of conductive material;

    coating a layer of photoresist onto the layer of metal;

    curing the layer of photoresist;

    exposing, through a first mask, a desired pattern of transparent conductors onto the layer of photoresist;

    developing the photoresist and simultaneously etching the layer of the conductive material and the layer of metal;

    exposing, through a second mask, a desired pattern of metal conductors onto the remaining layer of photoresist;

    developing the photoresist and etching the layer of metal,applying a further layer of photoresist;

    curing the further layer of photoresist;

    exposing the further layer of photoresist thorough the substrate; and

    developing the photoresist and allowing the layer to dry, resulting in a pattern of spacers/reliefs in registration with the metal conductors.

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