Lithographic apparatus and device manufacturing method

• US 7,362,415 B2
• Filed: 12/07/2004
• Issued: 04/22/2008
• Est. Priority Date: 12/07/2004
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Bleeker, Arno Jano, Franken, Dominicus Jacobus Petrus Adrianus, Troost, Kars Zeger, Hoeks, Martinus Hendricus Hendricus, Tegenbosch, Henricus Gerardus, Box, Wilhelmus Josephus, Kessels, Lambertus Gerardus Maria
• Primary Examiner(s): Nguyen; Henry Hung
• Application Number:
  US11/005,231
• Publication Number:
  US 20060119815A1
• Time in Patent Office: 1,232 Days
• Field of Search: 355/30, 355/53, 355/67, 355 72- 76, 359/845
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature

Abstract

A system and method are used to allow for compensation of a thermal output of an array of individually controllable elements. This can be done by inputting control signals to the array when it is not being used to pattern a projection beam in order to maintain the temperature of the array. A heating element can be provided to maintain the temperature of the array. A thermal reservoir can be provided to maintain the temperature of the array or a cooling element can be provided to reduce the temperature of the array during use.

Claims

1. A lithographic apparatus, comprising:

an illumination system that conditions a beam of radiation;

an array of individually controllable elements that pattern the beam;

a projection system that projects the patterned beam onto a target portion of a substrate;

a cooling element comprising at least one conduit in thermal contact with the array of individually controllable elements;

a cooling unit configured to adjust a temperature of fluid flowing through the conduit;

a flow controller configured to adjust a flow rate of the fluid flowing though the conduit; and

a cooling controller configured to provide control signals to the flow controller to adjust the flow rate of the fluid flowing though the conduit and to the cooling unit to adjust the temperature of the fluid flowing through the conduit, thereby controlling absorption by the fluid of heat dissipating from the array of individually controllable elements.

2. The apparatus of claim 1, wherein the cooling controller determines heat generated by the array of individually controllable elements from the pattern being generated and controls the cooling element to absorb a corresponding amount of heat from the array of individually controllable elements.

3. The apparatus of claim 1, further comprising:

a temperature sensor that monitors the temperature of the array of individually controllable elements, wherein the cooling controller determines an amount of heat to be absorbed from the array of individually controllable elements by the cooling element based on the monitored temperature and controls the cooling element to absorb the heat.

4. The apparatus of claim 1, wherein the fluid flowing through the conduit initially thermally contacts at least one of a plurality of regions of the array of individually controllable elements in a first order and subsequently thermally contacts the at least one of the plurality of regions in a second order different from the first order.

5. The apparatus of claim 4, wherein the second order is the reverse of the first order.

7. The apparatus of claim 1, wherein the cooling element further comprises a plurality of conduits in thermal contact with a plurality of regions of the array of individually controllable elements, wherein one of a plurality of flow controllers is configured to adjust a flow rate of fluid flowing through a respective one of the plurality of conduits, and wherein the cooling controller provides control signals to each of the plurality of flow controllers to adjust a flow rate of the fluid flowing through each of the plurality of conduits to control the absorption of the heat by the fluid from each of the plurality of regions, respectively.

13. The apparatus of claim 1, wherein the cooling unit comprises a pump.

6. A device manufacturing method, comprising:

using an array of individually controllable elements to pattern a beam of radiation;

projecting the patterned beam of radiation onto a target portion of a substrate; and

absorbing heat from the array of individually controllable elements using a cooling element comprising at least one conduit in thermal contact with the array of individually controllable elements; and

adjusting a temperature and a flow rate of the fluid flowing through the conduit using an associated cooling controller to control absorption by the fluid of dissipated heat.

8. A lithographic apparatus, comprising:

an illumination system configured to condition a beam of radiation;

an array of individually controllable elements configured to pattern the beam;

a projection system configured to project the patterned beam onto a target portion of a substrate;

a first cooling element comprising a first conduit arranged such that fluid flowing in the first conduit thermally contacts each of a plurality of regions of the array of individually controllable elements in a first order;

a first cooling controller coupled to the first cooling element to adjust a flow rate and a temperature of the fluid flowing through the first conduit;

a second cooling element comprising a second conduit arranged such that fluid flowing through the second conduit thermally contacts each of the plurality of regions of the array of individually controllable elements in a second order; and

a second cooling controller coupled to the second cooling element to adjust a flow rate and a temperature of the fluid flowing through the second conduit.

9. The apparatus of claim 8, wherein the second order is reverse of the first order.

14. The apparatus of claim 8, further comprising:

a first cooling unit coupled to the first cooling element; and

a second cooling unit coupled to the second cooling element,

wherein the first cooling controller provides control signals to the first cooling unit to adjust the temperature of the fluid flowing through the first conduit, and

wherein the second cooling controller provides control signals to the second cooling unit to adjust the temperature of the fluid flowing through the second conduit.

15. The apparatus of claim 14, wherein:

the first cooling unit comprises a first pump; and

the first cooling controller provides control signals to the first pump to adjust the flow rate of the fluid flowing through the first conduit.

16. The apparatus of claim 14, wherein:

the second cooling unit comprises a second pump; and

the second cooling controller provides control signals to the second pump to adjust the flow rate of the fluid flowing through the second conduit.

17. The apparatus of claim 8, wherein the temperature of each of the plurality of regions of the array of individually controllable elements is substantially the same.

10. A lithographic apparatus, comprising:

an illumination system configured to condition a beam of radiation;

an array of individually controllable elements configured to pattern the beam;

a projection system configured to project the patterned beam onto a target portion of a substrate;

a cooling element comprising at least one conduit in thermal contact with the array of individually controllable elements, wherein the fluid flowing through the conduit initially thermally contacts each of a plurality of regions of the array of individually controllable elements in a first order and subsequently contacts the each of the plurality of regions of the array of individually controllable elements in a second order; and

a cooling controller that adjusts a flow rate and a temperature of a fluid flowing through the conduit to control absorption of heat dissipating from the array of individually controllable elements.

11. The apparatus of claim 10, wherein the second order is the reverse of the first order.

12. The apparatus of claim 10, wherein the fluid flowing through the conduit initially contacts each of the plurality of arrays of individually controllable elements in a first order and subsequently contacts each of the plurality of arrays of individually controllable elements in a second order.

18. The apparatus of claim 10, further comprising:

a cooling unit coupled to the cooling element, wherein the cooling controller provides control signals to the cooling unit to adjust the temperature of the fluid flowing through the conduit.

19. The apparatus of claim 18, wherein:

the cooling unit comprises a pump; and

the cooling controller provides control signals to the pump to adjust the flow rate of the fluid flowing through the conduit.

20. The apparatus of claim 10, wherein the temperature of each of the plurality of regions of the array of individually controllable elements is substantially the same.