Micromirror and post arrangements on substrates
First Claim
Patent Images
1. A spatial light modulator comprising:
- a rectangular array of micromirrors on a substrate having four predominate sides that form a rectangular shape, each micromirror having four predominant sides, wherein each side is neither parallel nor perpendicular to the edges of the rectangular array; and
wherein each side of the micromirror is at an angle of from 5°
degrees to 25°
degrees to the two sides of the rectangular substrate.
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Abstract
A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
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Citations
32 Claims
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1. A spatial light modulator comprising:
- a rectangular array of micromirrors on a substrate having four predominate sides that form a rectangular shape, each micromirror having four predominant sides, wherein each side is neither parallel nor perpendicular to the edges of the rectangular array; and
wherein each side of the micromirror is at an angle of from 5°
degrees to 25°
degrees to the two sides of the rectangular substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
- a rectangular array of micromirrors on a substrate having four predominate sides that form a rectangular shape, each micromirror having four predominant sides, wherein each side is neither parallel nor perpendicular to the edges of the rectangular array; and
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22. A spatial light modulator comprising:
- an array of micromirrors, wherein imaginary lines connecting centers of each micromirror in the array form an imaginary grid of rows and columns orthogonal to each other, and wherein the edges of the micromirrors are not parallel to either the rows or columns in the imaginary grid, wherein the mirror plates are formed on a rectangular substrate; and
wherein each side of the micromirror is at an angle of from 5°
degrees to 25°
degrees to the two sides of the rectangular substrate. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
- an array of micromirrors, wherein imaginary lines connecting centers of each micromirror in the array form an imaginary grid of rows and columns orthogonal to each other, and wherein the edges of the micromirrors are not parallel to either the rows or columns in the imaginary grid, wherein the mirror plates are formed on a rectangular substrate; and
Specification