Inertial sensor
First Claim
Patent Images
1. A sensor comprising:
- a substrate;
a mass having an outer periphery, a cavity defining an inner periphery, and a plurality of elongated fingers along a portion of the inner periphery;
mass support structures, positioned within the inner periphery and affixed to the substrate by at least one anchor positioned proximate to the mass'"'"' center of mass, for supporting the mass above the substrate and allowing movement of the mass relative to the substrate; and
a plurality of elongated sensing fingers for sensing movement of the mass fingers relative to the sensing fingers, the sensing fingers positioned substantially alongside the mass fingers within the inner periphery and affixed to the mass support structures proximate to the at least one anchor such that mechanical stresses cause the mass fingers and the sensing fingers to move in substantially equal ways.
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Abstract
In an inertial sensor, a mass is supported by a number of mass support structures positioned within an inner periphery of the mass. The mass support structures are affixed to a substrate by at least one anchor positioned proximate to the mass'"'"' center of mass. A number of sensing fingers are affixed to the mass support structures.
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Citations
9 Claims
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1. A sensor comprising:
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a substrate; a mass having an outer periphery, a cavity defining an inner periphery, and a plurality of elongated fingers along a portion of the inner periphery; mass support structures, positioned within the inner periphery and affixed to the substrate by at least one anchor positioned proximate to the mass'"'"' center of mass, for supporting the mass above the substrate and allowing movement of the mass relative to the substrate; and a plurality of elongated sensing fingers for sensing movement of the mass fingers relative to the sensing fingers, the sensing fingers positioned substantially alongside the mass fingers within the inner periphery and affixed to the mass support structures proximate to the at least one anchor such that mechanical stresses cause the mass fingers and the sensing fingers to move in substantially equal ways. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification