Resistive elements using carbon nanotubes

• US 7,365,632 B2
• Filed: 09/20/2005
• Issued: 04/29/2008
• Est. Priority Date: 09/21/2004
• Status: Active Grant

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Bertin, Claude L., Ward, Jonathan W., Segal, Brent M., Ruckes, Thomas
• Primary Examiner(s): LEE, KYUNG S
• Application Number:
  US11/230,876
• Publication Number:
  US 20070236325A1
• Time in Patent Office: 952 Days
• Field of Search: 338 20- 21, 338/22.R, 338/195, 524/99, 524/233, 706/15, 257/414, 257/9, 711/127, 365/151
• US Class Current: 338/195
• CPC Class Codes: H01C 10/306 Polymer thick film, i.e. PTF
• CPC Class Codes: H01C 17/0652 containing carbon or carbides
• CPC Class Codes: H01C 17/232 Adjusting the temperature coefficient; Adjusting value of resistance by adjusting temperature coefficient of resistance
• CPC Class Codes: H01C 17/283 Precursor compositions therefor, e.g. pastes, inks, glass frits
• CPC Class Codes: H01C 7/003 Thick film resistors
• CPC Class Codes: H01C 7/005 Polymer thick films
• CPC Class Codes: H01C 7/006 Thin film resistors
• CPC Class Codes: H01C 7/06 including means to minimise changes in resistance with changes in temperature
• CPC Class Codes: H01L 28/22 with an active material comprising carbon, e.g. diamond or diamond-like carbon [DLC]

Abstract

Resistive elements include a patterned region of nanofabric having a predetermined area, where the nanofabric has a selected sheet resistance; and first and second electrical contacts contacting the patterned region of nanofabric and in spaced relation to each other. The resistance of the element between the first and second electrical contacts is determined by the selected sheet resistance of the nanofabric, the area of nanofabric, and the spaced relation of the first and second electrical contacts. The bulk resistance is tunable.

Claims

1. A resistive element, comprising:

a patterned region of nanofabric with a predefined area and a pre-selected sheet resistance, the nanofabric having a pre-selected temperature coefficient of resistance (TCR); and

first and second electrical contacts contacting the patterned region of nanofabric and in spaced relation to each other,

wherein a total resistance of the resistive element between the first and second electrical contacts is determined by the predefined area of the patterned region of nanofabric, the pre-selected sheet resistance of the patterned region of nanofabric between the first and second electrical contacts, and the pre-selected TCR of the nanofabric, and the spaced relation of the first and second electrical contacts; and

wherein the total resistance of the resistive element is tunable to a pre-selected total resistance.

2. The resistive element of claim 1, wherein the element has a temperature coefficient of resistance (TCR) that is within the range of about 25 ppm/degree C. to −

25 ppm/degree C.

3. The resistive element of claim 1, wherein the nanofabric includes metallic and semiconducting nanotubes in a selected ratio to provide a pre-selected TCR value.

4. The resistive element of claim 3, wherein the ratio is selected to provide TCR value that offsets a TCR value of another element in electrical communication with the resistive element.

5. The resistive element of claim 3, wherein the ratio is selected to provide a TCR value that offsets a TCR value of a contact between the nanofabric and at least one of the first and second electrical contacts.

6. The resistive element of claim 1, wherein the nanofabric includes metallic and semiconducting nanotubes in a selected ratio such that the resistive element has a temperature coefficient of resistance that is about zero ppm/degree C.

7. The resistive element of claim 1, wherein the resistive element carries a current up to about 1 milliamp per micron of a width of the region of nanofabric.

8. The resistive element of claim 1, wherein the pre-selected sheet resistance of the patterned region of nanofabric is at least partially pre-selected by adjusting a porosity of the nanofabric.

9. The resistive element of claim 1, wherein the total resistance of the resistive element is tuned to the pre-selected total resistance by cutting the nanofabric.

10. The resistive element of claim 1, wherein the pre-selected sheet resistance of the patterned region of nanofabric is between 1 k-Ohm/square and 1 M-Ohm/square.

11. The resistive element of claim 1, wherein the pre-selected sheet resistance of the patterned region of nanofabric is at least partially pre-selected by minimizing defects in nanotubes forming the nanofabric.

12. The resistive element of claim 1, wherein opposing ends of the patterned region of nanofabric terminate under the first and second electrical contacts, respectively.

13. The resistive element of claim 1, wherein the first and second electrical contacts comprise metal.

14. The resistive element of claim 1, further comprising at least one contact terminal, wherein the first and second electrical contacts each comprises first and second layers, wherein the first layer contacts the nanofabric and is selected for low contact resistance with the nanofabric, and wherein the second layer contacts an said at least one contact terminal and is selected for good electrical conduction with said at least one contact terminal.

15. The resistive element of claim 14, wherein the first layer comprises at least one of one of tungsten, titanium, chromium, and palladium.

16. The resistive element of claim 14, wherein the second layer comprises at least one of one of tungsten, aluminum, and copper.

17. The resistive element of claim 1, further comprising a passivation layer.

18. The resistive element of claim 1, wherein the resistive element comprises a discretely packaged resistor.

19. The resistive element of claim 1, wherein the resistive element is part of an integrated circuit.

20. The resistive element of claim 1, further comprising at least one contact terminal, wherein electrical communication between the first and second electrical contacts and respective at least one contact terminal is provided through wire bonding.

21. The resistive element of claim 1, further comprising at least one contact terminal, wherein electrical communication between the first and second electrical contacts and respective at least one contact terminal is provided through conductive bumps.

22. The resistive element of claim 1, wherein the nanofabric includes single walled nanotubes.

23. The resistive element of claim 1, wherein the nanofabric includes a conformal monolayer of nanotubes.

24. The resistive element of claim 1, wherein the nanofabric includes metallic nanotubes.

25. The resistive element of claim 1, wherein the nanofabric includes semiconducting nanotubes.

26. The resistive element of claim 1, wherein the nanofabric includes combinations of nanotubes in series.

27. The resistive element of claim 1, wherein the nanofabric includes combinations of nanotubes in parallel.

28. The resistive element of claim 1, wherein the resistive element operates stably at temperatures up to at least about 1000 degrees Celsius.

29. The resistive element of claim 1, wherein the resistive element is laser-scribable.

30. The resistive element of claim 1, wherein the sheet resistance of the patterned region of nanofabric is tunable at least by selecting the porosity of the nanofabric.

31. The resistive element of claim 1, wherein providing the TCR value of the nanofabric is tunable at least by selecting the porosity of the nanofabric.

32. A method of making a resistive element, comprising:

providing a substrate;

providing a layer of nanotubes disposed on the substrate, wherein providing the layer comprises selecting a porosity of the layer and further comprises pre-selecting a ratio of metallic and semiconducting nanotubes forming the layer to determine a pre-selected range of values of a temperature coefficient of resistance (TCR) for the resistive element;

patterning the layer of nanotubes to form a patterned region of nanofabric to provide a pre-selected sheet resistance of the layer;

providing first and second electrical contacts in contact with the patterned region of nanofabric; and

tuning a total resistance of the resistive element between the first and second electrical contacts to a pre-selected total resistance.

33. The method of claim 32, wherein pre-selecting the porosity comprises applying the layer of nanotubes with a pre-selected density.

34. The method of claim 32, wherein providing the layer of nanotubes comprises one of chemical vapor deposition, aerosol application, spray coating, dipping, and spin coating.

35. The method of claim 32, wherein tuning the resistance of the resistive element comprises cutting the patterned region of nanofabric.

36. The method of claim 35, wherein cutting the patterned region of nanofabric comprises laser scribing.

37. The method of claim 35, wherein cutting the patterned region of nanofabric comprises mechanical scribing.

38. The method of claim 32, wherein patterning the fabric of nanotubes comprises steps of lithography and etching.

39. The method of claim 32, wherein providing the first and second electrical contacts in contact with the patterned region of nanofabric comprises disposing the first and second electrical contacts at opposing ends of the patterned region of nanofabric.

40. The method of claim 32, wherein providing the first and second electrical contacts comprises sputtering.

41. The method of claim 32, further comprising applying a passivation layer over the patterned region of nanofabric and the first and second electrical contacts.

42. The method of claim 41, further comprising forming first and second holes in the passivation layer over at least a portion of the first and second electrical contacts, respectively.

43. The method of claim 32, wherein pre-selecting a ratio of metallic and semiconducting nanotubes to determine the pre-selected range of TCR values for the resistive element further comprises controllably removing metallic nanotubes.

44. The method of claim 32, wherein a TCR value of the resistive element is determined to be within the pre-selected range of TCR values by obtaining measurements of a total resistance of the resistive element at multiple temperatures and computing the TCR value from the measurements.

45. The method of making a resistive element of claim 32, wherein a total TCR value of the resistive element is tunable at least by selecting the dimensions of the contact area between the patterned region of nanofabric and the first and second electrical contacts.

46. The method of making a resistive element of claim 32, wherein at least one of the first and second electrical contacts comprise a semiconductor material.

47. The method of making a resistive element of claim 32, wherein the layer of nanotubes includes multi-walled nanotubes.

48. The method of making a resistive element of claim 32, wherein a total TCR value of the resistive element is tunable at least by selecting the material of at least one of the first and second electrical contacts in contact with the patterned region of nanofabric.

49. The method of making a resistive element of claim 32, wherein the preselected range of temperature coeffienct of resistance values is about 25 ppm/degree C. to −

25 ppm/degree C.

50. The method of making a resistive element of claim 32, wherein at least the ratio of metallic and semiconductive nanotubes forming the layer is selected to provide a TCR value that offsets a TCR value of another element in electrical communication with the resistive element.

51. The method of making a resistive element of claim 32, wherein at least the ratio of metallic and semiconductive nanotubes forming the layer is selected to provide a TCR value that offsets a TCR value of a contact between the patterned region of nanofabric and at least one of the first and second electrical contacts.

52. The method of making a resistive element of claim 32, wherein the ratio of metallic and semiconductive nanotubes forming the layer is selected ratio such to provide a temperature coefficient of resistance of the resistive element that is about zero ppm/degree C.

53. The method of making a resistive element of claim 32, wherein the pre-selected sheet resistance of the layer is between 1 k-Ohm/square and 1 M-Ohm/square.

54. The method of making a resistive element of claim 32, wherein the pre-selected sheet resistance of the layer is at least partially pre-selected by minimizing defects in nanotubes forming the patterned region of nanofabric.

55. The method of making a resistive element of claim 32, wherein opposing ends of the patterned region of nanofabric terminate under the first and second electrical contacts, respectively.

56. The method of making a resistive element of claim 32, wherein the first and second electrical contacts comprise metal.

57. The method of making a resistive element of claim 32, further comprising providing at least one contact terminal, wherein the first and second electrical contacts each comprises first and second layers, wherein the first layer contacts the nanofabric and is selected for low contact resistance with the patterned region of nanofabric, and wherein the second layer contacts said at least one contact terminal and is selected for good electrical conduction with said at least one contact terminal.

58. The method of making a resistive element of claim 57, wherein the first layer comprises at least one of one of tungsten, titanium, chromium, and palladium.

59. The method of making a resistive element of claim 57, wherein the second layer comprises at least one of one of tungsten, aluminum, and copper.

60. The method of making a resistive element of claim 32, further comprising providing at least one contact terminal, wherein electrical communication between the first and second electrical contacts and respective at least one contact terminal is provided through one of wire bonding and conductive bumps.

61. The method of making a resistive element of claim 32, wherein the nanotubes includes single walled nanotubes.

62. The method of making a resistive element of claim 32, wherein the layer of nanotubes includes a conformal monolayer of nanotubes.

63. The method of making a resistive element of claim 32, wherein the resistive element operates stably at temperatures up to at least about 1000 degrees Celsius.