Pattern generator
First Claim
1. An apparatus for creating a pattern on a workpiece sensitive to light radiation, the apparatus comprising:
- a light source for emitting light in the wavelength range from EUV to IR;
a spatial light modulator (SLM) having a multitude of modulating elements and adapted to be illuminated by said light source;
a projection system for projecting an image of the modulator on the workpiece;
a precision mechanical system for scanning the workpiece by providing a continuous relative motion between the projection system and the workpiece, thereby causing the image of the modulator to move continuously on the workpiece;
an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting said digital description of the pattern to modulator signals and feeding said signals to the modulator, andan electronic control system for controlling the position of the workpiece and the feeding of the signals to the modulator so that said pattern is created on the workpiece;
whereinsaid projection system creates the pattern on the workpiece during said scanning of the workpiece; and
said electronic control system is further arranged to control a trigger signal to the light source for emitting the light so that a trigger signal timing is varied to at least partially correct for pattern placement errors.
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Abstract
The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.
26 Citations
7 Claims
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1. An apparatus for creating a pattern on a workpiece sensitive to light radiation, the apparatus comprising:
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a light source for emitting light in the wavelength range from EUV to IR; a spatial light modulator (SLM) having a multitude of modulating elements and adapted to be illuminated by said light source; a projection system for projecting an image of the modulator on the workpiece; a precision mechanical system for scanning the workpiece by providing a continuous relative motion between the projection system and the workpiece, thereby causing the image of the modulator to move continuously on the workpiece; an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting said digital description of the pattern to modulator signals and feeding said signals to the modulator, and an electronic control system for controlling the position of the workpiece and the feeding of the signals to the modulator so that said pattern is created on the workpiece;
whereinsaid projection system creates the pattern on the workpiece during said scanning of the workpiece; and said electronic control system is further arranged to control a trigger signal to the light source for emitting the light so that a trigger signal timing is varied to at least partially correct for pattern placement errors. - View Dependent Claims (2, 3)
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4. A method for creating a pattern on a workpiece sensitive to light radiation, the method comprising:
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emitting light in the wavelength range from EUV to IR, modulating the emitted light with a spatial light modulator (SLM) having a multitude of modulating elements, scanning the workpiece by providing a continuous relative motion between a projection system and the workpiece, thereby causing the image of the modulator to move continuously on the workpiece; projecting, using said projecting system, an image of the modulator on the workpiece during said continuous scanning of the workpiece; controlling the emitted radiation, the modulator and the positioning of the workpiece to create said pattern on said workpiece;
whereinsaid controlling step involves controlling a trigger signal to a light source for emitting the light so that a trigger signal timing is varied to at least partly correct for pattern placement errors.
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5. An apparatus for creating a pattern on a workpiece sensitive to light radiation, the apparatus comprising:
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a light source for emitting light in the wavelength range from EUV to IR, a spatial light modulator (SLM) having a multitude of modulating elements adapted to be illuminated by said light source; a projection system for projecting an image of the modulator on the workpiece; a precision mechanical system for scanning the workpiece by providing a continuous relative motion between the projection system and the workpiece, thereby causing the image of the modulator to move continuously on the workpiece; an electronic control system for controlling the position of the pattern created on the workpiece, the modulating elements of the modulator and the intensity of the radiation in accordance with a pattern to be created;
whereinsaid projection system creates the pattern on the workpiece during said scanning of the workpiece, and said electronic control system is further arranged to control a trigger signal to the light source for emitting the light so that a trigger signal timing is varied to at least partially correct for pattern placement errors. - View Dependent Claims (6, 7)
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Specification