Pressure sensor module and pressure detecting device
First Claim
1. A pressure sensor module comprising:
- a thin plate-like diaphragm displaceable by a pressure of a fluid to be measured;
a detector provided on the diaphragm and adapted to detect the displacement of the diaphragm;
a thin film layer displaceable by the pressure of the fluid to be measured, the thin film layer being arranged facing, through a holding space formed by a holder, a surface of the diaphragm opposite to a detector side of the diaphragm;
a displacement transmitter for transmitting a displacement of the thin film layer to the diaphragm; and
a vent hole that allows the holding space to communicate with the outer space.
1 Assignment
0 Petitions
Accused Products
Abstract
A pressure sensor module 2, wherein a holding space 34 is formed between a diaphragm 22 and a thin film layer 31, and a vent hole 321 communicating with the exterior of a first case is provided in the holding space 34. In the above pressure sensor module, even when a corrosive gas or chemical solution is used as a fluid to be measured and a corrosive gas component originated from the fluid to be measured permeates into the holding space 34, the permeated corrosive gas component can be discharged to the outside of the case through the vent hole 321. As a result, the corrosion of the diaphragm 22 by the fluid to be measured can be prevented, which results in the achievement of a prolonged service life of the pressure sensor module 2.
10 Citations
20 Claims
-
1. A pressure sensor module comprising:
-
a thin plate-like diaphragm displaceable by a pressure of a fluid to be measured; a detector provided on the diaphragm and adapted to detect the displacement of the diaphragm; a thin film layer displaceable by the pressure of the fluid to be measured, the thin film layer being arranged facing, through a holding space formed by a holder, a surface of the diaphragm opposite to a detector side of the diaphragm; a displacement transmitter for transmitting a displacement of the thin film layer to the diaphragm; and a vent hole that allows the holding space to communicate with the outer space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
-
17. A pressure detecting device comprising:
-
a pressure sensor module; and a case for housing the pressure sensor module, the case having an opening formed in a manner that a surface of the thin film layer opposite to the diaphragm faces an outside from the opening, wherein the pressure sensor module includes; a thin plate-like diaphragm displaceable by a pressure of a fluid to be measured; a detector provided on the diaphragm and adapted to detect the displacement of the diaphragm; a thin film layer displaceable by the pressure of the fluid to be measured, the thin film layer being arranged facing, through a holding space formed by a holder, a surface of the diaphragm opposite to a detector side of the diaphragm; a displacement transmitter for transmitting a displacement of the thin film layer to the diaphragm; and a vent hole that allows the holding space to communicate with the outer space. - View Dependent Claims (18, 19, 20)
-
Specification